Substrate lamination system and method
First Claim
Patent Images
1. A substrate lamination apparatus, the apparatus comprising:
- a vacuum chamber;
a flexible membrane, the flexible membrane partitioning the vacuum chamber into a first compartment and a second compartment; and
a substrate support.
1 Assignment
0 Petitions
Accused Products
Abstract
The present disclosure is directed to a substrate lamination system and method.
A substrate lamination apparatus may comprise: (a) a vacuum chamber; (b) a flexible membrane; and (c) a substrate support.
A system for laminating substrates may comprise: (a) a vacuum chamber; (b) a flexible membrane; (c) a substrate support; (d) a vacuum pump; (e) a compressor; and (f) a control unit, wherein the control unit is configured to carry out the steps: (i) evacuating the vacuum chamber; and (ii) applying pressure to at least one of a first substrate and a second substrate.
-
Citations
37 Claims
-
1. A substrate lamination apparatus, the apparatus comprising:
-
a vacuum chamber; a flexible membrane, the flexible membrane partitioning the vacuum chamber into a first compartment and a second compartment; and a substrate support. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
-
-
18. A substrate lamination system, the apparatus comprising:
-
a vacuum chamber; a flexible membrane, the flexible membrane partitioning the vacuum chamber into a first compartment and a second compartment; a substrate support; a vacuum pump; a compressor; and a control unit. wherein the control unit is configured to carry out the steps; evacuating the vacuum chamber; applying pressure to at least one of a first substrate and a second substrate. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
-
Specification