×

Substrate lamination system and method

  • US 20090120585A1
  • Filed: 01/18/2008
  • Published: 05/14/2009
  • Est. Priority Date: 08/30/2005
  • Status: Active Grant
First Claim
Patent Images

1. A substrate lamination apparatus, the apparatus comprising:

  • a vacuum chamber;

    a flexible membrane, the flexible membrane partitioning the vacuum chamber into a first compartment and a second compartment; and

    a substrate support.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×