ACTIVE MATRIX DEVICE, METHOD FOR MANUFACTURING SWITCHING ELEMENT, ELECTRO-OPTICAL DISPLAY DEVICE, AND ELECTRONIC APPARATUS
First Claim
1. An active matrix device, comprising:
- a substrate;
a pixel electrode formed at a side adjacent to one of surfaces of the substrate;
a switching element, including;
a fixed electrode formed so as to correspond to the pixel electrode and coupled with the pixel electrode;
a movable electrode formed so as to be displaced toward the fixed electrode along a surface direction of the substrate to be in one of states being in contact with the fixed electrode and apart from the fixed electrode;
a driving electrode formed so as to form an electrostatic gap between the movable electrode and the driving electrode, the fixed electrode, the movable electrode, and the driving electrode being disposed in different positions from each other along the surface direction of the substrate;
a first wiring line coupled with the movable electrode; and
a second wiring line coupled with the driving electrode, wherein the switching element generates an electrostatic attraction between the movable electrode and the driving electrode by applying a voltage between the movable electrode and the driving electrode so as to displace the movable electrode to be in contact with the fixed electrode for obtaining electrical conduction between the first wiring line and the pixel electrode.
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Accused Products
Abstract
An active matrix device includes: a substrate; a pixel electrode formed at a side adjacent to one of surfaces of the substrate; a switching element, including: a fixed electrode formed so as to correspond to the pixel electrode and coupled with the pixel electrode; a movable electrode formed so as to be displaced toward the fixed electrode along a surface direction of the substrate to be in one of states being in contact with the fixed electrode and apart from the fixed electrode; a driving electrode formed so as to form an electrostatic gap between the movable electrode and the driving electrode, the fixed electrode, the movable electrode, and the driving electrode being disposed in different positions from each other along the surface direction of the substrate; a first wiring line coupled with the movable electrode; and a second wiring line coupled with the driving electrode. The switching element generates an electrostatic attraction between the movable electrode and the driving electrode by applying a voltage between the movable electrode and the driving electrode so as to displace the movable electrode to be in contact with the fixed electrode for obtaining electrical conduction between the first wiring line and the pixel electrode.
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Citations
12 Claims
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1. An active matrix device, comprising:
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a substrate; a pixel electrode formed at a side adjacent to one of surfaces of the substrate; a switching element, including; a fixed electrode formed so as to correspond to the pixel electrode and coupled with the pixel electrode; a movable electrode formed so as to be displaced toward the fixed electrode along a surface direction of the substrate to be in one of states being in contact with the fixed electrode and apart from the fixed electrode; a driving electrode formed so as to form an electrostatic gap between the movable electrode and the driving electrode, the fixed electrode, the movable electrode, and the driving electrode being disposed in different positions from each other along the surface direction of the substrate; a first wiring line coupled with the movable electrode; and a second wiring line coupled with the driving electrode, wherein the switching element generates an electrostatic attraction between the movable electrode and the driving electrode by applying a voltage between the movable electrode and the driving electrode so as to displace the movable electrode to be in contact with the fixed electrode for obtaining electrical conduction between the first wiring line and the pixel electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification