Sacrificial Compositions And Methods Of Fabricating A Structure Using Sacrificial Compositions
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Abstract
Compositions, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary composition, among others, includes a polymer and a catalytic amount of a negative tone photoinitiator.
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Citations
13 Claims
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1-3. -3. (canceled)
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4. A method for fabricating a structure, comprising:
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disposing a composition onto a surface, wherein the composition includes a sacrificial polymer and a photoacid generator, wherein the sacrificial polymer is chosen from a polynorbornene, a polycarbonate, and a copolymer of polynorbornene and polynorbornene carbonate, and combinations thereof; exposing at least a portion of the composition to a first energy; and removing a portion of the composition via exposing the portions to a second energy to form a first air-gap in the composition, the removed portion corresponding to the portion exposed to the first energy. - View Dependent Claims (5, 7, 8, 9, 10, 11, 12)
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6. (canceled)
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13-18. -18. (canceled)
Specification