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Photodiode Array

  • US 20090121306A1
  • Filed: 12/21/2005
  • Published: 05/14/2009
  • Est. Priority Date: 12/24/2004
  • Status: Abandoned Application
First Claim
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1. A photodiode array having a plurality of photodetecting channels which is formed in a semiconductor substrate and light to be detected is made to enter, whereinon an incident surface side for the light to be detected of the semiconductor substrate,accumulation layers having an impurity concentration higher than in the semiconductor substrate are formed,on an opposite surface side of the incident surface of the semiconductor substrate,multipliers for avalanche-multiplying carriers generated due to incidence of the light to be detected;

  • andresistors which are electrically connected to the multipliers and are connected in parallel to each other, are formed for the respective photodetecting channels, andthe photodetecting channels are separated from each other by separators formed around the respective multipliers.

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