Illumination optical apparatus and projection exposure apparatus
First Claim
1. An illumination optical apparatus for illuminating a first object with illumination light from a light source, comprising:
- at least two birefringent members arranged along a traveling direction of the illumination light,wherein a direction of a fast axis of at least one birefringent member out of the birefringent members is different from a direction of a fast axis of the other birefringent member, andwherein a specific illumination beam incident in a specific incidence angle range onto the first object among the light in a substantially single polarization state supplied from the light source is light in a polarization state consisting primarily of S-polarization.
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Accused Products
Abstract
An illumination optical apparatus and projection exposure apparatus capable of reducing a light quantity loss when a mask is illuminated with a polarized illumination light. An illumination optical system for illuminating a reticle with an illumination light and a projection optical system for projecting the pattern image of the reticle onto a wafer are provided. An illumination light emitted from an exposure light source in a linearly polarized state in the illumination optical system passes through first and second birefringent members having different fast axis directions and is converted into a polarized state that is substantially linearly polarized in a circumferential direction with the optical axis as the center in an almost specific annular area, and them illuminates the reticle under an annular illuminating condition after passing through a fly-eye lens.
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Citations
31 Claims
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1. An illumination optical apparatus for illuminating a first object with illumination light from a light source, comprising:
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at least two birefringent members arranged along a traveling direction of the illumination light, wherein a direction of a fast axis of at least one birefringent member out of the birefringent members is different from a direction of a fast axis of the other birefringent member, and wherein a specific illumination beam incident in a specific incidence angle range onto the first object among the light in a substantially single polarization state supplied from the light source is light in a polarization state consisting primarily of S-polarization. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An illumination optical apparatus for illuminating a first object with light supplied from an outside light source, comprising:
a diffractive optical element and a birefringent member arranged in order along a traveling direction of the light. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
Specification