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Illumination optical apparatus and projection exposure apparatus

  • US 20090122292A1
  • Filed: 12/23/2008
  • Published: 05/14/2009
  • Est. Priority Date: 10/28/2003
  • Status: Active Grant
First Claim
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1. An illumination optical apparatus for illuminating a first object with illumination light from a light source, comprising:

  • at least two birefringent members arranged along a traveling direction of the illumination light,wherein a direction of a fast axis of at least one birefringent member out of the birefringent members is different from a direction of a fast axis of the other birefringent member, andwherein a specific illumination beam incident in a specific incidence angle range onto the first object among the light in a substantially single polarization state supplied from the light source is light in a polarization state consisting primarily of S-polarization.

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