Multiplex Biosensor
First Claim
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1. A biosensor device, comprising:
- a CMOS integrated circuit having a SAW device as an on-chip component and configured for an analyte detection assay, wherein the SAW device has an Si substrate having a piezoelectric film thereon, said film supporting an input IDT and an output IDT in cooperative association, and having a biochemical coating there-between for detecting at least one analyte;
wherein the biochemical coating acts as an analyte capture binding surface, and wherein upon binding of said analyte to said biochemical coating a surface acoustic wave signal is generated that is indicative of the presence of the analyte.
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Abstract
This invention relates to CMOS SAW-based biosensor devices for detecting analytes and biomolecules of interest.
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Citations
15 Claims
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1. A biosensor device, comprising:
- a CMOS integrated circuit having a SAW device as an on-chip component and configured for an analyte detection assay, wherein the SAW device has an Si substrate having a piezoelectric film thereon, said film supporting an input IDT and an output IDT in cooperative association, and having a biochemical coating there-between for detecting at least one analyte;
wherein the biochemical coating acts as an analyte capture binding surface, and wherein upon binding of said analyte to said biochemical coating a surface acoustic wave signal is generated that is indicative of the presence of the analyte. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
- a CMOS integrated circuit having a SAW device as an on-chip component and configured for an analyte detection assay, wherein the SAW device has an Si substrate having a piezoelectric film thereon, said film supporting an input IDT and an output IDT in cooperative association, and having a biochemical coating there-between for detecting at least one analyte;
Specification