Semiconductor device comprising an image sensor, apparatus comprising such a semiconductor device and method of manufacturing such a semiconductor device
First Claim
1. A semiconductor device comprising a semiconductor body in which an image sensor is formed and having a semiconductor body surface with an optically active part of the image sensor and a non-optically active part of the image sensor in which electrical connection areas of the image sensor are located, a spacer structure being present on the semiconductor body surface in the non-optically active part of the image sensor and an optical passive component being positioned on top of the spacer structure and above the image sensor and allowing radiation to impinge on the optically active part of the image sensor, characterized in that the spacer structure is an open structure allowing the atmosphere above the optically active part of the image sensor to contact the atmosphere outside the spacer structure.
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Abstract
The invention relates to a semiconductor device comprising a semiconductor body in which an image sensor is formed and having a semiconductor body surface with an optically active part of the image sensor and a non-optically active part of the image sensor in which electrical connection areas of the image sensor are located, a spacer structure being present on the semiconductor body surface in the non-optically active part of the image sensor and an optical passive component being positioned on top of the spacer structure and above the image sensor and allowing radiation to impinge on the optically active part of the image sensor.
According to the invention the spacer structure is an open structure allowing the atmosphere above the optically active part of the image sensor to contact the atmosphere outside the spacer structure. The spacer structure may comprise a ring provided with at least one interruption and positioned around the optically active part of the image sensor. Preferably, the spacer structure comprises a plurality of dots.
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14 Claims
- 1. A semiconductor device comprising a semiconductor body in which an image sensor is formed and having a semiconductor body surface with an optically active part of the image sensor and a non-optically active part of the image sensor in which electrical connection areas of the image sensor are located, a spacer structure being present on the semiconductor body surface in the non-optically active part of the image sensor and an optical passive component being positioned on top of the spacer structure and above the image sensor and allowing radiation to impinge on the optically active part of the image sensor, characterized in that the spacer structure is an open structure allowing the atmosphere above the optically active part of the image sensor to contact the atmosphere outside the spacer structure.
- 11. A method of manufacturing a semiconductor device comprising a semiconductor body in which an image sensor is formed and having a semiconductor body surface with an optically active part of the image sensor and a non-optically active part of the image sensor in which electrical connection areas of the image sensor are located, a spacer structure being formed on the semiconductor body surface in the non-optically active part of the image sensor and an optical passive component is positioned on top of the spacer structure and above the image sensor and allowing radiation to impinge on the optically active part of the image sensor, characterized in that the spacer structure is formed as an open structure allowing the atmosphere above the optically active part of the image sensor to contact the atmosphere outside the spacer structure.
Specification