Microphone Membrane And Microphone Comprising The Same
First Claim
Patent Images
1. A microphone membrane comprising:
- piezoelectric layers that are stacked; and
a first metal layer among the piezoelectric layers;
wherein axes of the piezoelectric layers are oriented in a the same direction.
1 Assignment
0 Petitions
Accused Products
Abstract
The invention relates to a microphone membrane (M1) comprising two piezoelectric layers (PS1, PS2) with c-axes oriented in the same direction. A first electroconductive surface (E11) is formed in the central metal layer and subjected to a first electrical potential. The piezoelectric layers (PS1, PS2) are respectively arranged between the central metal layer (ML2) and an outer metal layer (ML1, ML3). In a preferred embodiment, the membrane (M1) has a largely symmetrical structure in terms of the layer sequence and the layer thickness thereof.
104 Citations
26 Claims
-
1. A microphone membrane comprising:
-
piezoelectric layers that are stacked; and a first metal layer among the piezoelectric layers; wherein axes of the piezoelectric layers are oriented in a the same direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
-
-
18. A microphone comprising
a supporting substrate having a recess; - and
a membrane mounted above the recess, wherein the membrane is clamped to the supporting substrate on one side of the membrane only, and wherein another side of the membrane can vibrate upon application of an acoustic signal. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26)
- and
-
19. A microphone comprising:
-
a supporting substrate having a recess; a membrane mounted above the recess, wherein different ends of the membrane are fastened to the supporting substrate, and wherein other different ends of the membrane are not fastened to the supporting substrate and can vibrate upon application of an acoustic signal.
-
Specification