PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, DIELECTRIC WINDOW USED THEREIN, AND MANUFACTURING METHOD OF SUCH A DIELECTRIC WINDOW
First Claim
1. A plasma processing apparatus having a vacuum container, a sample electrode which is disposed inside the vacuum container and is to be mounted with a sample, a gas supply apparatus for supplying a gas to inside the vacuum container, plural gas flow-out holes formed in a dielectric window which is opposed to the sample electrode, an exhaust apparatus for exhausting the vacuum container, a pressure control device for controlling pressure in the vacuum container, and an electromagnetic coupling device for generating an electromagnetic field inside the vacuum container,wherein the dielectric window is composed of plural dielectric plates, grooves are formed in at least one of two confronting surfaces of the dielectric plates, gas passages are formed by the grooves and a flat surface of a dielectric plate opposed to the grooves, and gas supply portions for supplying the grooves with gases coming from the gas supply apparatus are provided;
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Accused Products
Abstract
A method for performing plasma doping which is high in uniformity. A prescribed gas is introduced into a vacuum container from gas supply apparatus while being exhausted through an exhaust hole by a turbomolecular pump as an exhaust apparatus. The pressure in the vacuum container is kept at a prescribed value by a pressure regulating valve. High-frequency power of 13.56 MHz is supplied from a high-frequency power source to a coil which is disposed close to a dielectric window which is opposed to a sample electrode, whereby induction-coupled plasma is generated in the vacuum container. The dielectric window is composed of plural dielectric plates, and grooves are formed in at least one surface of at least two dielectric plates opposed to each other. Gas passages are formed by the grooves and a flat surface(s) opposed to the grooves, and gas flow-out holes which are formed in the dielectric plate that is closest to the sample electrode communicate with the grooves inside the dielectric window. The flow rates of gases that are introduced through the gas flow-out holes and the gas flow-out holes, respectively, can be controlled independently of each other, whereby the uniformity of processing can be increased.
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Citations
32 Claims
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1. A plasma processing apparatus having a vacuum container, a sample electrode which is disposed inside the vacuum container and is to be mounted with a sample, a gas supply apparatus for supplying a gas to inside the vacuum container, plural gas flow-out holes formed in a dielectric window which is opposed to the sample electrode, an exhaust apparatus for exhausting the vacuum container, a pressure control device for controlling pressure in the vacuum container, and an electromagnetic coupling device for generating an electromagnetic field inside the vacuum container,
wherein the dielectric window is composed of plural dielectric plates, grooves are formed in at least one of two confronting surfaces of the dielectric plates, gas passages are formed by the grooves and a flat surface of a dielectric plate opposed to the grooves, and gas supply portions for supplying the grooves with gases coming from the gas supply apparatus are provided; - and
the gas flow-out holes which are formed in a dielectric plate that is closest to the sample electrode communicate with the grooves inside the dielectric window. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A plasma processing method for processing a substrate to be processed by generating gas plasma containing impurity ions by operating an electromagnetic coupling means opposed to a sample electrode which is disposed inside a vacuum container and mounted with the substrate to be processed while supplying a gas containing an impurity to inside the vacuum container at a prescribed rate and a prescribed concentration and controlling pressure in the vacuum container to a prescribed value, comprising the steps of:
giving a distribution to a concentration or a supply rate of a gas containing the impurity that is supplied to a surface of the substrate to be processed. - View Dependent Claims (26, 27, 28)
- 29. A dielectric window formed by laminating at least two dielectric plates, wherein grooves are formed in at least one surface of at least two dielectric plates, and gas flow-out holes which are formed in a surface of a dielectric plate that is one surface of the dielectric window communicate with the grooves inside the dielectric window.
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31. A manufacturing method of a dielectric window, comprising the steps of:
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forming through-holes in a dielectric plate (A); forming grooves in a dielectric plate (B); and placing in a vacuum and heating the dielectric plate (A) in which the through-holes are formed and the dielectric plate (B) in which the grooves are formed while bringing at least one surfaces of the dielectric plates (A) and (B) in contact with each other, and thereby joining the contacting surfaces together.
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32. A manufacturing method of a dielectric window, comprising the steps of:
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forming through-holes and grooves in a dielectric plate (A); and placing in a vacuum and heating the dielectric plate (A) in which the through-holes and the grooves are formed and another dielectric plate (B) while bringing at least one surfaces of the dielectric plates (A) and (B) in contact with each other, and thereby joining the contacting surfaces together.
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Specification