Method of transformation of bridging organic groups in organosilica materials
First Claim
1. A method of treating a material comprising a metal oxide framework containing organic groups each bridging at least two metal atoms to increase a hydrophobicity and decrease a dielectric constant of said material, the method comprising the step of;
- applying an effective treatment to cause a hydroxyl group-consuming chemical transformation of at least some of said organic groups from a bridging to a terminal configuration, wherein applying said effective treatment increases a hydrophobicity of said material and decreases a dielectric constant of said material.
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Abstract
This invention relates to a chemical transformation of the bridging organic groups in metal oxide materials containing bridging organic groups, such as bridged organosilicas, wherein such a transformation greatly benefits properties for low dielectric constant (k) applications. A thermal treatment at specific temperatures is shown to cause a transformation of the organic groups from a bridging to a terminal configuration, which consumes polar hydroxyl groups. The transformation causes k to decrease, and the hydrophobicity to increase (through ‘self-hydrophobization’). As a result of the bridge-terminal transformation, porous organosilica films are shown to have k<2.0, E>6 GPa, do not require additional chemical surface treatment for dehydroxylation (hydrophobicity).
30 Citations
52 Claims
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1. A method of treating a material comprising a metal oxide framework containing organic groups each bridging at least two metal atoms to increase a hydrophobicity and decrease a dielectric constant of said material, the method comprising the step of;
applying an effective treatment to cause a hydroxyl group-consuming chemical transformation of at least some of said organic groups from a bridging to a terminal configuration, wherein applying said effective treatment increases a hydrophobicity of said material and decreases a dielectric constant of said material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 48, 49, 50)
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11. A material comprising a metal oxide framework containing organic groups produced by a method comprising the steps of:
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synthesizing a metal oxide framework containing organic groups bridging at least two metal atoms; and applying an effective treatment to cause a hydroxyl group-consuming chemical transformation of at least some of said organic groups from bridging to a terminal configuration. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 47, 51)
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- 37. A periodic porous organosilica material wherein no other terminal groups are present but terminal organic groups bound to the Si atom by a Si—
Specification