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MEASUREMENT APPARATUS

  • US 20090132192A1
  • Filed: 11/14/2008
  • Published: 05/21/2009
  • Est. Priority Date: 11/19/2007
  • Status: Active Grant
First Claim
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1. A measurement apparatus configured to measure a position of an object to be measured using a plurality of signals representing the position of the object to be measured, the measurement apparatus comprising:

  • a distortion correcting part configured to generate a plurality of correction signals by correcting the plurality of signals using a distortion coefficient which is stored in the measurement apparatus;

    a distortion coefficient arithmetic unit configured to correct and update the distortion coefficient by comparing each of the plurality of correction signals with an ideal signal waveform;

    a square-root of sum of squares arithmetic unit configured to calculate a square-root of sum of squares of the plurality of correction signals generated by the distortion correcting part;

    a first normalizing part configured to generate a plurality of first normalized signals by dividing each of the plurality of correction signals by the square-root of sum of squares; and

    a phase arithmetic unit configured to calculate the position of the object to be measured based on -the plurality of first normalized signals calculated by the first normalizing part.

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