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Yaw rate sensor using surface acoustic wave

  • US 20090133495A1
  • Filed: 11/25/2008
  • Published: 05/28/2009
  • Est. Priority Date: 11/28/2007
  • Status: Active Grant
First Claim
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1. A yaw rate sensor, comprising:

  • a substrate;

    a group of exciting electrodes, disposed on a surface of the substrate, which excites a first surface acoustic wave and transmits the first surface acoustic wave through the surface of the substrate in a propagation direction;

    a group of perturbative weights, disposed on the surface of the substrate, which is oscillated by the first surface acoustic wave in a thickness direction orthogonal to the propagation direction, generates a second surface acoustic wave excited by a Coriolis force, which is induced in response to the oscillation of the group of perturbative weights and a yaw applied to the perturbative weights, and transmits the second surface acoustic wave through the surface of the substrate in a detection direction orthogonal to both the propagation direction and the oscillation direction; and

    a detecting unit, disposed on the surface of the substrate, which detects a yaw rate from an intensity of the second surface acoustic wave,wherein the group of perturbative weights is symmetric with respect to a driving axis extending straight along the propagation direction, and the group of exciting electrodes is symmetric with respect to the driving axis.

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