Tuning Bar Vibrator and Vibrating Gyroscope Using the Same
First Claim
1. A tuning bar vibrator comprising:
- a meander-shaped vibrating body having a first principal surface and a second principal surface;
two driving electrodes extending from a first end side of the first principal surface of the vibrating body in a longitudinal direction thereof to a middle portion of the first principal surface of the vibrating body, the two driving electrodes being separated in a width direction of the vibrating body;
a sensing electrode that extending from a second end side of the first principal surface of the vibrating body in the longitudinal direction thereof to the middle portion of the first principal surface;
a metal film on the second principal surface of the vibrating body; and
a support portion located at a portion of the vibrating body corresponding to a node when the vibrating body bends and vibrates, and that supports the vibrating body.
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Accused Products
Abstract
A tuning bar vibrator formed on a substrate and including a vibrating body. The vibrating body is formed into a meander shape as a whole, and a middle vibrating reed is used as a first detection unit. At one end side of the vibrating body, two sensing electrodes are formed and connected respectively to two extended electrodes. A further sensing electrode and a common electrode are formed on a first principal surface of the first detection unit. A common electrode formed on a second principal surface of the vibrating body is connected to the common electrode on the first principal surface via a through-hole. The further sensing electrode and the common electrode are connected respectively to another set of extended electrodes. A tuning bar vibrator that is small in size, may be reduced in profile and may be used as a vibrating gyroscope having a desirable detection sensitivity, and a vibrating gyroscope using the tuning bar vibrator are obtained.
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Citations
15 Claims
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1. A tuning bar vibrator comprising:
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a meander-shaped vibrating body having a first principal surface and a second principal surface; two driving electrodes extending from a first end side of the first principal surface of the vibrating body in a longitudinal direction thereof to a middle portion of the first principal surface of the vibrating body, the two driving electrodes being separated in a width direction of the vibrating body; a sensing electrode that extending from a second end side of the first principal surface of the vibrating body in the longitudinal direction thereof to the middle portion of the first principal surface; a metal film on the second principal surface of the vibrating body; and a support portion located at a portion of the vibrating body corresponding to a node when the vibrating body bends and vibrates, and that supports the vibrating body. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification