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MINIATURE CELL ARRAY STRUCTURE AND MANUFACTURING METHOD OF MINIATURIZED COMPOSITE COMPONENT USING SUCH A MINIATURE CELL ARRAY STRUCTURE

  • US 20090133804A1
  • Filed: 09/06/2006
  • Published: 05/28/2009
  • Est. Priority Date: 09/09/2005
  • Status: Active Grant
First Claim
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1. A method of manufacturing a cell array structure, comprising:

  • a first step of laminating a deformable layer capable of causing plastic deformation on a substrate, said substrate being formed with plural, mutually separated depressions on a top surface thereof, such that said deformable layer forms a mutually isolated space in each of said plural depressions; and

    a second step of extending said space in each of said plural depressions by causing plastic deformation in said deformable layer, such that there are formed plural columnar cells respectively in correspondence to said plural depressions.

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