MINIATURE CELL ARRAY STRUCTURE AND MANUFACTURING METHOD OF MINIATURIZED COMPOSITE COMPONENT USING SUCH A MINIATURE CELL ARRAY STRUCTURE
First Claim
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1. A method of manufacturing a cell array structure, comprising:
- a first step of laminating a deformable layer capable of causing plastic deformation on a substrate, said substrate being formed with plural, mutually separated depressions on a top surface thereof, such that said deformable layer forms a mutually isolated space in each of said plural depressions; and
a second step of extending said space in each of said plural depressions by causing plastic deformation in said deformable layer, such that there are formed plural columnar cells respectively in correspondence to said plural depressions.
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Abstract
A method of manufacturing a cell array structure includes a first step of laminating a deformable layer capable of causing plastic deformation on a substrate, the substrate being formed with plural, mutually separated depressions on a top surface thereof, such that the deformable layer forms a mutually isolated space in each of the plural depressions; and a second step of extending the space in each of the plural depressions by causing plastic deformation in the deformable layer, such that there are formed plural columnar cells respectively in correspondence to the plural depressions.
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20 Claims
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1. A method of manufacturing a cell array structure, comprising:
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a first step of laminating a deformable layer capable of causing plastic deformation on a substrate, said substrate being formed with plural, mutually separated depressions on a top surface thereof, such that said deformable layer forms a mutually isolated space in each of said plural depressions; and a second step of extending said space in each of said plural depressions by causing plastic deformation in said deformable layer, such that there are formed plural columnar cells respectively in correspondence to said plural depressions. - View Dependent Claims (2, 3)
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4. A method of manufacturing a minute composite material, comprising:
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a first step of laminating a deformable layer capable of causing plastic deformation on a substrate, said substrate being formed with plural, mutually separated depressions on a top surface thereof, such that said deformable layer forms a mutually isolated space in each of said plural depressions; a second step of extending said space in each of said plural depressions by causing plastic deformation in said deformable layer, such that there are formed plural columnar cells respectively in correspondence to said plural depressions; and a third step of forming plural columnar components in said respective columnar cells. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification