Radiation imaging element
First Claim
Patent Images
1. A radiation imaging element comprising radiation sensors disposed in a matrix so as to output signal charges corresponding to radiation transmitted through a subject, and thin film field effect transistors for readout of signals from the radiation sensors, wherein:
- each thin film field effect transistor comprises at least a gate electrode, a gate insulating layer, an active layer, a source electrode and a drain electrode;
the active layer comprises at least a first region and a second region which has an electric conductivity larger than an electric conductivity of the first region;
the second region is in contact with the gate insulating layer; and
the first region is disposed so as to be electrically connected between the second region and at least one of the source electrode or the drain electrode.
2 Assignments
0 Petitions
Accused Products
Abstract
A radiation imaging element that includes radiation sensors disposed in a matrix so as to output signal charges corresponding to radiation transmitted through a subject, and TFTs for readout of signals from the radiation sensors, wherein
- the TFT has at least a gate electrode, a gate insulating layer, an active layer, a source electrode and a drain electrode,
- the active layer has at least a first region and a second region which has an electric conductivity larger than an electric conductivity of the first region,
- the second region is in contact with the gate insulating layer, and
- the first region is disposed so as to be electrically connected between the second region and at least one of the source electrode or the drain electrode.
A radiation imaging element that effectively suppresses noise and also achieves a high quality image is provided.
26 Citations
15 Claims
-
1. A radiation imaging element comprising radiation sensors disposed in a matrix so as to output signal charges corresponding to radiation transmitted through a subject, and thin film field effect transistors for readout of signals from the radiation sensors, wherein:
-
each thin film field effect transistor comprises at least a gate electrode, a gate insulating layer, an active layer, a source electrode and a drain electrode; the active layer comprises at least a first region and a second region which has an electric conductivity larger than an electric conductivity of the first region; the second region is in contact with the gate insulating layer; and the first region is disposed so as to be electrically connected between the second region and at least one of the source electrode or the drain electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
-
Specification