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DIAMOND ULTRAVIOLET SENSOR

  • US 20090134403A1
  • Filed: 11/22/2005
  • Published: 05/28/2009
  • Est. Priority Date: 11/25/2004
  • Status: Active Grant
First Claim
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1. A diamond ultraviolet sensor having a light-receiving sensitivity to ultraviolet light of a wavelength of 260 nm or less, which is a photoconductive type or a Schottky type light sensing device having two terminal electrodes to detect light irradiated to a light-receiving unit by the change in electrical resistance of a light-receiving unit material or the change in light induced current,wherein a diamond surface, which is obtained by removing a surface conductive layer by an oxidation treatment of a hydrogen-terminated surface of a diamond semiconductor epitaxially grown on a diamond (100) or (111) plane single crystalline substrate which is formed by high-pressure synthesis, is used for bonding interfaces between the light-receiving unit and the electrodes,a rectifier electrode is a single layer using no Au, and at least one selected from the group consisting of TiC, ZrC, HfC, VC, NbC, TaC, CrC, MoC, and WC, which is a carbide compound of a high melting point metal element, is used as the single layer, andan ohmic electrode has a two-layered laminate structure using no Au, in which a single metal is used as a first layer which can form a solid solution with a carbide or carbon in the vicinity of a bonding interface between the diamond and the electrode by reaction with the diamond through a heat treatment, at least one selected from the group consisting of TiC, ZrC, HfC, VC, NbC, TaC, CrC, MoC, and WC, which is a carbide compound of a high melting point element, is used as a second layer, and the first layer and the second layer are processed by a heat treatment.

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