System and Method for Focused Ion Beam Data Analysis

• US 20090135240A1
• Filed: 11/15/2005
• Published: 05/28/2009
• Est. Priority Date: 11/15/2004
• Status: Active Grant

• Current Assignee: DCG Systems Incorporated (Thermo Fisher Scientific Incorporated)
• Original Assignee: DCG Systems Incorporated (Thermo Fisher Scientific Incorporated)
• Inventors: Anderson, Michael Anthony, Phaneuf, Michael William, Lagarec, Ken Guillaume
• Granted Patent: US 7,897,918 B2
• Time in Patent Office: Days
• US Class Current: 347/246
• CPC Class Codes: G01N 1/286 involving mechanical work, e.g. chopping, disintegrating, compacting, homogenising microtomes G01N1/06; pulverising in general B02C; mixing in general B01F
• CPC Class Codes: G01N 2001/2873 Cutting or cleaving
• CPC Class Codes: H01J 2237/221 Image processing
• CPC Class Codes: H01J 2237/30466 Detecting endpoint of process for plasma apparatus H01J37/32963, for sputtering apparatus H01J37/3479
• CPC Class Codes: H01J 2237/30483 Scanning
• CPC Class Codes: H01J 2237/31745 for preparing specimen to be viewed in microscopes or analyzed in microanalysers
• CPC Class Codes: H01J 2237/31749 Focused ion beam
• CPC Class Codes: H01J 37/304 Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
• CPC Class Codes: H01J 37/3056 for microworking, e.g. etching of gratings, trimming of electrical components trimming of resistors H01C17/22

Abstract

A system and method for improving FIB milling endpointing operations. The methods involve generating real-time images of the area being milled and real-time graphical plots of pixel intensities with an increased sensitivity over native FIB system generated images and plots. The images and plots are generated with raw signal data obtained from the native FIB system. More specifically, the raw signal data is processed according to specific algorithms for generating images and corresponding intensity graphs which can be reliably used for accurate endpointing. In particular, the displayed images will display more visual information regarding changes in milled material, while the intensity graphs will plot aggregate pixel intensity data on a dynamically adjusting scale to dramatically highlight relative changes in milled material.

Claims

1. A method for enhancing endpointing determination in a charged particle beam system operation involving material modification, comprising:

a) receiving dwell point information from each frame generated by the CPB system, the information including dwell point intensity values;

b) processing the dwell point intensity values of a first region of interest of a first number of frames to derive raster data, and when the first region of interest is defined, mapping the raster data to an image palette and displaying the resultant raster image;

c) plotting a summation of the dwell point intensity values of a second region of interest of a second number of frames on an endpoint graph versus charged particle dose or rastering time, when the second region of interest is defined.

2. The method of claim 1, wherein the raster data is mapped and displayed after one of a predetermined time interval has elapsed, a predetermined dose increment is received or a predetermined number of frames has elapsed.

3. The method of claim 1, wherein the summed dwell point intensity values are plotted after one of a predetermined time interval has elapsed, a predetermined dose increment is received or a predetermined number of frames has elapsed.

4. The method of claim 1, wherein the first number is automatically calculated to obtain raster images having an appearance of real-time responsiveness to changes and improved signal to noise ratio over a live raster image.

5. The method of claim 1, wherein each raster data is processed by summing the dwell point intensity values of the first number of frames, resealing the raster data from a selected minimum value to a selected maximum value over a predetermined scale, where values in the raster data less than or equal to the selected minimal value become a new minimum value and values in the raster data greater than or equal to the selected maximum value become a new maximum value, and applying another image palette mapping that ranges from the new minimum value to the new maximum value and displaying the resultant scaled raster image.

6. The method of claim 1, wherein the raster data mapped to the image palette remains unchanged until one of a predetermined time interval has elasped, a predetermined dose increment is received or a predetermined number of frames has elapsed.

7. The method of claim 1, further including a step of generating a differential display image from a difference between current raster data and a predetermined number of previous raster data.

8. The method of claim 7, wherein each of the predetermined number of previous raster data is weighted by decreasing percentages.

9. The method of claim 1, wherein the image palette can include multiple colors which are effective for increasing the perception of changes in the resultant raster image compared to a greyscale palette.

10. The method of claim 1, further including a step of determining if the charged particle beam system is in an imaging mode, thereby classifying the frame information as corresponding to an imaging mode operation for imaging a field of view or a subset of the field of view.

11. The method of claim 10, wherein an image corresponding to frame information for the imaging mode operation is displayed in an imaging mode window.

12. The method of claim 11, wherein the raster image is displayed in a raster mode window.

13. The method of claim 12, wherein the imaging mode window is brought to the foreground if the frame information is classified as an imaging mode operation, and the raster mode window is brought to the foreground if the frame information is classified as a raster operation.

14. The method of claim 12, wherein the raster image is scaled and superimposed in the correct location on the imaging mode window.

15. The method of claim 1, wherein steps b) and c) are repeated two or more times for a plurality of regions of interest and a variable number of frames.

16. The method of claim 1, wherein step b) is repeated two or more times for the first region of interest and a variable number of frames and image palettes.

17. The method of claim 15, wherein step c) is executed for only the region of interest with the smallest area.

18. The method of claim 1, further including generating thumbnail data from the raster data by scaling the raster data after one of a predetermined time interval, a predetermined dose increment or a predetermined number of frames, for subsequent storage.

19. The method of claim 18, further including storing one or more of the image palette, a charged particle beam current, a delivered charged particle dose, a rastering time and the endpoint graph data corresponding to the thumbnail data.

20. The method of claim 19, further including a step of displaying the endpoint graph and at least one thumbnail image constructed by applying the image palette to at least one of the thumbnail data, each thumbnail image being cross-referenced to one corresponding intensity value on the endpoint graph such that selecting a value on the endpoint graph causes the nearest cross-referenced thumbnail to be displayed.

21. The method of claim 18, further including a step of constructing a cross-section image by defining a line segment in the plane of the thumbnail data, and generating a row of the cross-section image by analyzing the intensity values along the line segment of each thumbnail datum and stacking each row sequentially from top to bottom, such that the horizontal axis of the cross-section image corresponds to space and the vertical axis corresponds to time or dose.

22. The method of claim 21, wherein the step of analyzing includes one of averaging or integrating the intensity values along a vector perpendicular to the line segment for a predetermined distance on either side of the line segment.

23. The method of claim 21, further including a step of displaying the endpoint graph, at least one thumbnail image constructed by applying a predetermined image palette to at least one of the thumbnail datum, and the cross section image, each thumbnail image being cross-referenced to one corresponding intensity value on the endpoint graph and one row of the cross-section image.

24. The method of claim 23, wherein selecting a point on the endpoint graph causes the nearest cross-referenced thumbnail image to be displayed and the cross-referenced row of the cross-section image to be indicated.

25. The method of claim 23, wherein selecting a row on the cross-section image causes the cross-referenced thumbnail image to be displayed and the cross-referenced point on the endpoint graph to be indicated.

26. The method of claim 1, wherein the first region of interest is set to be an area occupied by at least one raster shape in the frame.

27. The method of claim 1, wherein the first region of interest is set to be a subset of an area occupied by at least one raster shape in the frame.

28. The method of claim 27, wherein the subset is selected to exclude all dwell points within a predetermined distance from a perimeter of the at least one raster shape.

29. The method of claim 28, wherein the at least one raster shape has at least one internal perimeter, the subset being selected to further exclude all dwell points within another predetermined distance from the at least one internal perimeter.

30. The method of claim 27, wherein the first region of interest is set to be a union of the areas occupied by at least two raster shapes overlapping in the frame.

31. The method of claim 30, wherein the first region of interest is further selected to exclude all dwell points within a predetermined distance from a perimeter of the at least one raster shape.

32. The method of claim 1, wherein the second region of interest is set to be the area occupied by at least one raster shape in the frame.

33. The method of claim 1, wherein the second region of interest is set to be a subset of the area occupied by at least one raster shape in the frame.

34. The method of claim 33, wherein the subset is selected to exclude all dwell points within a predetermined distance from a perimeter of the at least one raster shape.

35. The method of claim 34, wherein the at least one raster shape has at least one internal perimeter, the subset being selected to further exclude all dwell points within another predetermined distance from the at least one internal perimeter.

36. The method of claim 33, wherein the second region of interest is set to be a union of the areas occupied by at least two raster shapes overlapping in the frame.

37. The method of claim 36, wherein the second region of interest is further selected to exclude all dwell points within a predetermined distance from a perimeter of the at least one raster shape.

38. The method of claim 1, wherein the information from each frame generated by the CPB system, and CPB system operating parameters are stored for subsequent retrieval and processing according to steps b) and c).

39. The method of claim 1, wherein the step of plotting includes re-scaling the y-axis to a new range which includes all summed dwell point intensity values over the range of the x-axis displayed on the endpoint graph, for increasing ease of perception in determining when changes in the summed dwell point intensity values are occurring.

40. A method for imaging in a charged particle beam system operation involving material modification, comprising:

a) receiving dwell point information from each frame generated by the CPB system, the information including dwell point intensity values;

b) processing the dwell point intensity values of a region of interest of a number of frames to derive raster data, mapping the raster data to an image palette and displaying the resultant raster image stretched by a first predetermined factor greater than zero in a first axis and by a second predetermined factor greater than zero in a second axis.

41. The method of claim 40, wherein the first predetermined factor and the second predetermined factor are equal.

42. The method of claim 40, wherein the second predetermined factor is greater than the first predetermined factor.