SPATIAL LIGHT MODULATION UNIT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
First Claim
1. A spatial light modulation unit arranged in an optical path of an illumination optical apparatus, the spatial light modulation unit comprising:
- a first spatial light modulator with a plurality of first optical elements which are arranged two-dimensionally and postures of which each are individually controlled; and
a second spatial light modulator arranged at a position where light having traveled via the first spatial light modulator arrives, said second spatial light modulator having a plurality of second optical elements which are two-dimensionally arranged in correspondence to the respective first optical elements and postures of which each are individually controlled.
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Accused Products
Abstract
This invention relates to an illumination optical apparatus capable of forming a pupil intensity distribution of a desired shape and desired illuminance and, in turn, capable of realizing illumination conditions of great variety. The illumination optical apparatus has a spatial light modulation unit composed of a first spatial light modulator and a second spatial light modulator arranged in an order of incidence of light, and a distribution forming optical system to form a predetermined light intensity distribution on an illumination pupil, based on a beam having traveled via the first spatial light modulator and the second spatial light modulator. The first spatial light modulator has a plurality of first optical elements which are two-dimensionally arranged and postures of which each are individually controlled. The second spatial light modulator has a plurality of second optical elements which are two-dimensionally arranged in correspondence to the first optical elements and postures of which each are individually controlled.
59 Citations
14 Claims
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1. A spatial light modulation unit arranged in an optical path of an illumination optical apparatus, the spatial light modulation unit comprising:
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a first spatial light modulator with a plurality of first optical elements which are arranged two-dimensionally and postures of which each are individually controlled; and a second spatial light modulator arranged at a position where light having traveled via the first spatial light modulator arrives, said second spatial light modulator having a plurality of second optical elements which are two-dimensionally arranged in correspondence to the respective first optical elements and postures of which each are individually controlled. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification