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SPATIAL LIGHT MODULATION UNIT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

  • US 20090135392A1
  • Filed: 11/07/2008
  • Published: 05/28/2009
  • Est. Priority Date: 11/08/2007
  • Status: Active Grant
First Claim
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1. A spatial light modulation unit arranged in an optical path of an illumination optical apparatus, the spatial light modulation unit comprising:

  • a first spatial light modulator with a plurality of first optical elements which are arranged two-dimensionally and postures of which each are individually controlled; and

    a second spatial light modulator arranged at a position where light having traveled via the first spatial light modulator arrives, said second spatial light modulator having a plurality of second optical elements which are two-dimensionally arranged in correspondence to the respective first optical elements and postures of which each are individually controlled.

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