SERVER AND PROGRAM

• US 20090138118A1
• Filed: 04/24/2007
• Published: 05/28/2009
• Est. Priority Date: 05/09/2006
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Inokawa, Takumi, Koyama, Noriaki
• Granted Patent: US 8,190,283 B2
• Time in Patent Office: Days
• US Class Current: 700/110
• CPC Class Codes: G05B 19/4184 characterised by fault tolerance, reliability of production system
• CPC Class Codes: G05B 2219/31365 Send message to most appropriate operator as function of kind of error
• CPC Class Codes: G05B 23/0264 Control of logging system, e.g. decision on which data to store; time-stamping measurements
• CPC Class Codes: G06Q 10/06 Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
• CPC Class Codes: G06Q 50/04 Manufacturing
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
• CPC Class Codes: Y02P 90/30 Computing systems specially adapted for manufacturing

Abstract

A server device includes: an abnormality information output unit for storing a plurality of measurement information, which is time sequential information related to information measured in a plurality of manufacturing apparatuses, having manufacturing apparatus identifiers and time information, and storing at least one set of abnormality information indicating an abnormality and one or more measurement information, and outputting one or more abnormality information; a chart composing unit for composing one or more charts from one or more measurement information in pair with one or more abnormality information corresponding to an abnormality information instruction when the instruction, which is an instruction for one or more abnormality information among the one or more abnormality information outputted by the abnormality information output unit, is received; and an output unit for outputting the one or more charts composed by the chart composing unit, so that abnormality analysis can be carried out easily and efficiently.

Claims

1. A server device constituting a group management system, which includes a plurality of manufacturing apparatuses for performing a preset process on a target substrate and the server device connected with the plurality of manufacturing apparatuses and has a function of performing an abnormality analysis after detecting an abnormality, the server device comprising:

a receiving unit for receiving an input including an instruction;

a measurement information storage unit for storing therein a plurality of measurement information, which is time sequential information measured in the plurality of manufacturing apparatuses, having manufacturing apparatus identifiers for identifying the manufacturing apparatuses and time information indicating time;

an abnormality information storage unit for storing therein at least one set of abnormality information indicating an abnormality and one or more measurement information;

an abnormality information output unit for outputting one or more abnormality information stored in the abnormality information storage unit;

a chart composing unit for composing one or more charts from one or more measurement information in pair with one or more abnormality information corresponding to an abnormality information instruction when the receiving unit receives the abnormality information instruction, which is an instruction for one or more abnormality information among the one or more abnormality information outputted by the abnormality information output unit; and

an output unit for outputting the one or more charts composed by the chart composing unit.

2. The server device of claim 1, further comprising:

a group chart information storage unit for storing therein one or more group chart information including more than one chart identification information for identifying a chart;

a related chart identification information acquisition unit, when the receiving unit receives a related chart output instruction for outputting a chart related to the outputted one or more charts after the one or more charts are outputted, for acquiring, from group chart information including all chart identification information or any one chart identification information among one or more chart identification information for identifying the outputted one or more charts, one or more chart identification information except the one or more chart identification information for identifying the outputted one or more chart; and

a related chart composing unit for composing one or more charts by acquiring one or more measurement information from the measurement information storage unit for each of the one or more chart identification information acquired by the related chart identification information acquisition unit,

wherein the output unit also outputs the one or more charts composed by the related chart composing unit.

3. The server device of claim 1, wherein the chart composing unit composes a chart in which the one or more measurement information in pair with the abnormality information corresponding to the abnormality information instruction is visually distinguished from the other measurement information.

4. The server device of claim 1, wherein the chart composing unit composes an SPC chart plotting the one or more measurement information.

5. The server device of claim 2, wherein the related chart composing unit composes an SPC chart plotting the one or more measurement information.

6. The server device of claim 1, wherein the one or more measurement information contains two kinds of measurement values, and

the chart composing unit composes a correlation chart showing a correlation between the two kinds of the measurement values.

7. The server device of claim 2, wherein the one or more measurement information contains two kinds of measurement values, and

the related chart composing unit composes a correlation chart showing a correlation between the two kinds of measurement values.

8. The server device of claim 1, wherein the one or more measurement information contains more than two kinds of measurement values, and

the chart composing unit composes an MD chart showing a correlation between the more than two kinds of measurement values.

9. The server device of claim 2, wherein the one or more measurement information contains more than two kinds of measurement values, and

the related chart composing unit composes an MD chart showing a correlation between the more than two kinds of measurement values.

10. A program to be executed in a server device constituting a group management system, which includes a plurality of manufacturing apparatuses for performing a preset process on a target substrate and the server device connected with the plurality of manufacturing apparatuses and has a function of performing an abnormality analysis after detecting an abnormality,

wherein the program stores therein a plurality of measurement information, which is time sequential information measured in the plurality of manufacturing apparatuses, having manufacturing apparatus identifiers for identifying the manufacturing apparatuses and time information indicating time, and at least one set of abnormality information indicating an abnormality and one or more measurement information, and the program executes on a computer:

a receiving step for receiving an input including an instruction;

an abnormality information output step for outputting the stored one or more abnormality information;

a chart composing step for composing one or more charts from one or more measurement information in pair with one or more abnormality information corresponding to an abnormality information instruction when the abnormality information instruction is received in the receiving step, the abnormality information instruction being an instruction for one or more abnormality information among the one or more abnormality information outputted in the abnormality information output step; and

an output step for outputting the one or more chart composed in the chart composing step.

11. The program of claim 10, wherein the program further executes on the computer:

a related chart identification information acquiring step for acquiring, from group chart information including all chart identification information or any one chart identification information among one or more chart identification information for identifying the outputted one or more charts, one or more chart identification information except the one or more chart identification information for identifying the outputted one or more chart, when a related chart output instruction for outputting a chart related to the outputted one or more charts is received in the receiving step after the one or more charts are outputted; and

a related chart composing step for composing one or more charts by acquiring one or more measurement information for each of the one or more chart identification information acquired in the related chart identification information acquiring step,

wherein the one or more charts composed in the related chart composing step is also outputted in the output step.

12. The program of claim 10, wherein a chart, in which the one or more measurement information in pair with the abnormality information corresponding to the abnormality information instruction is visually distinguished from the other measurement information, is composed in the chart composing step.