Packaged micro movable device and method for making the same
First Claim
1. A method for making packaged micro-devices each comprising a micro movable element having a movable part, a first packaging member formed with a first recess corresponding in position to the movable part, and a second packaging member formed with a second recess corresponding in position to the movable part, the method comprising:
- a first bonding step for bonding a first packaging wafer to a device wafer, the first packaging wafer being formed with a plurality of first recesses, the device wafer used for forming a plurality of micro movable elements and including a first surface and a second surface opposite to the first surface, the bonding of the first packaging wafer being performed with respect to the first surface of the device wafer;
a second bonding step for bonding a second packaging wafer to the second surface of the device wafer, the second packaging wafer being formed with a plurality of second recesses; and
a dicing step for cutting a laminate assembly including the device wafer, the first packaging wafer and the second packaging wafer.
1 Assignment
0 Petitions
Accused Products
Abstract
A method is provided for making packaged micro-devices each including a micro movable element, a first packaging member formed with a recess, and a second packaging member formed with another recess. The micro movable element has a movable part. In accordance with the method, a device wafer is prepared for forming a plurality of micromovable elements. A first packaging wafer, formed with a plurality of recesses corresponding in position to the movable parts of the respective movable elements, is bonded to one surface of the device wafer. A second packaging wafer, formed with a plurality of recesses, is bonded to the other surface of the device wafer. The resulting laminate assembly is cut into separate products.
11 Citations
13 Claims
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1. A method for making packaged micro-devices each comprising a micro movable element having a movable part, a first packaging member formed with a first recess corresponding in position to the movable part, and a second packaging member formed with a second recess corresponding in position to the movable part, the method comprising:
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a first bonding step for bonding a first packaging wafer to a device wafer, the first packaging wafer being formed with a plurality of first recesses, the device wafer used for forming a plurality of micro movable elements and including a first surface and a second surface opposite to the first surface, the bonding of the first packaging wafer being performed with respect to the first surface of the device wafer; a second bonding step for bonding a second packaging wafer to the second surface of the device wafer, the second packaging wafer being formed with a plurality of second recesses; and a dicing step for cutting a laminate assembly including the device wafer, the first packaging wafer and the second packaging wafer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A packaged micro-device comprising:
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a micro movable element including a movable part; a first packaging member including a first recess corresponding in position to the movable part; and a second packaging member including a second recess corresponding in position to the movable part.
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Specification