PHOTOELECTRIC CONVERSION DEVICE AND MANUFACTURING METHOD THEREOF
First Claim
1. A photoelectric conversion device comprising:
- a first electrode over a substrate;
a first unit cell including a single crystal semiconductor layer over the first electrode;
an intermediate layer over the first unit cell;
a second unit cell including a semiconductor layer over the intermediate layer; and
a second electrode over the second unit cell,wherein the semiconductor layer includes a first impurity semiconductor layer, a second impurity semiconductor layer and a non-single-crystal semiconductor layer interposed between the first and second impurity semiconductor layers, andwherein the first impurity semiconductor layer has one conductivity type and the second impurity semiconductor layer has a conductivity type opposite to the conductivity type of the first impurity semiconductor layer.
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Abstract
It is an object of the present invention to provide a photoelectric conversion device with an excellent photoelectric converting characteristic while effectively utilizing silicon semiconductor material. A photoelectric conversion device comprises a first electrode, a first unit cell including a single-crystal semiconductor layer which is obtained by cleaving a single crystal semiconductor substrate at a damaged layer, a second unit cell including a non-single-crystal semiconductor layer, an intermediate layer including a transition metal oxide, and a second electrode, wherein the first unit cell and second unit cell are connected in series with the intermediate layer interposed therebetween and are sandwiched between the first electrode and the second electrode.
83 Citations
33 Claims
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1. A photoelectric conversion device comprising:
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a first electrode over a substrate; a first unit cell including a single crystal semiconductor layer over the first electrode; an intermediate layer over the first unit cell; a second unit cell including a semiconductor layer over the intermediate layer; and a second electrode over the second unit cell, wherein the semiconductor layer includes a first impurity semiconductor layer, a second impurity semiconductor layer and a non-single-crystal semiconductor layer interposed between the first and second impurity semiconductor layers, and wherein the first impurity semiconductor layer has one conductivity type and the second impurity semiconductor layer has a conductivity type opposite to the conductivity type of the first impurity semiconductor layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A photoelectric conversion device comprising:
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a first electrode over a substrate; a first unit cell including a single crystal semiconductor layer over the first electrode; a first intermediate layer over the first unit cell; a second unit cell including a first semiconductor layer over the first intermediate layer; a second intermediate layer over the second unit cell; a third unit cell including a second semiconductor layer over the second intermediate layer; and a second electrode over the third unit cell, wherein the first semiconductor layer includes a first impurity semiconductor layer, a second impurity semiconductor layer and a first non-single-crystal semiconductor layer interposed between the first and second impurity semiconductor layers, wherein the second semiconductor layer includes a third impurity semiconductor layer, a fourth impurity semiconductor layer and a second non-single-crystal semiconductor layer interposed between the third and fourth impurity semiconductor layers, wherein the first impurity semiconductor layer has one conductivity type and the second impurity semiconductor layer has a conductivity type opposite to the conductivity type of the first impurity semiconductor layer, and wherein the third impurity semiconductor layer has one conductivity type and the fourth impurity semiconductor layer has a conductivity type opposite to the conductivity type of the third impurity semiconductor layer. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A method for manufacturing a photoelectric conversion device, comprising the steps of:
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introducing a cluster ion into a single crystal semiconductor substrate through one surface of the single crystal semiconductor substrate to form a damaged layer; forming a first impurity semiconductor layer on the one surface of single crystal semiconductor substrate, wherein the first impurity semiconductor layer has one conductivity type; forming a first electrode over the first impurity semiconductor layer; forming an insulating layer over the first electrode; bonding the insulating layer to a supporting substrate; cleaving the single crystal semiconductor substrate at the damaged layer, so that a single crystal semiconductor layer remains over the supporting substrate; forming a second impurity semiconductor layer on a cleavage plane side of the single crystal semiconductor layer, wherein the second impurity semiconductor layer has a conductivity type opposite to the conductivity type of the first impurity semiconductor layer; forming an intermediate layer over the second impurity semiconductor layer; forming a third impurity semiconductor layer over the intermediate layer, wherein the third impurity semiconductor layer has one conductivity type; forming a non-single-crystal semiconductor layer over the third impurity semiconductor layer; forming a fourth impurity semiconductor layer over the non-single-crystal semiconductor layer, wherein the fourth impurity semiconductor layer has a conductivity type opposite to the conductivity type of the third impurity semiconductor layer; and forming a second electrode over the fourth impurity semiconductor layer. - View Dependent Claims (23, 24, 25, 26, 27)
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28. A method for manufacturing a photoelectric conversion device, comprising the steps of:
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introducing a cluster ion into a single crystal semiconductor substrate through one surface of the single crystal semiconductor substrate to form a damaged layer; forming a first impurity semiconductor layer on the one surface of single crystal semiconductor substrate, wherein the first impurity semiconductor layer has one conductivity type; forming a first electrode over the first impurity semiconductor layer; forming an insulating layer over the first electrode; bonding the insulating layer to a supporting substrate; cleaving the single crystal semiconductor substrate at the damaged layer, so that a single crystal semiconductor layer remains over the supporting substrate; forming a second impurity semiconductor layer on a cleavage plane side of the single crystal semiconductor layer, wherein the second impurity semiconductor layer has a conductivity type opposite to the conductivity type of the first impurity semiconductor layer; forming a first intermediate layer over the second impurity semiconductor layer; forming a third impurity semiconductor layer over the first intermediate layer, wherein the third impurity semiconductor layer has one conductivity type; forming a first non-single-crystal semiconductor layer over the third impurity semiconductor layer; forming a fourth impurity semiconductor layer over the first non-single-crystal semiconductor layer, wherein the second impurity semiconductor layer has a conductivity type opposite to the conductivity type of the first impurity semiconductor layer; forming a second intermediate layer over the fourth impurity semiconductor layer; forming a fifth impurity semiconductor layer over the second intermediate layer, wherein the fifth impurity semiconductor layer has one conductivity type; forming a second non-single-crystal semiconductor layer over the fifth impurity semiconductor layer; forming a sixth impurity semiconductor layer over the second non-single-crystal semiconductor layer, wherein the sixth impurity semiconductor layer has a conductivity type opposite to the conductivity type of the fifth impurity semiconductor layer; and forming a second electrode over the sixth impurity semiconductor layer. - View Dependent Claims (29, 30, 31, 32, 33)
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Specification