ELECTRONIC DEVICE AND METHOD FOR PRODUCING ELECTRONIC DEVICE

• US 20090139752A1
• Filed: 08/19/2008
• Published: 06/04/2009
• Est. Priority Date: 10/11/2007
• Status: Active Grant

• Current Assignee: Riken
• Original Assignee: Riken
• Inventors: Tsukagoshi, Kazuhito, Odaka, Syunsuke, Miyazaki, Hisao, Aoyagi, Yoshinobu
• Granted Patent: US 8,043,978 B2
• Time in Patent Office: Days
• US Class Current: 174/256
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: H01L 29/0665 the shape of the body defining a nanostructure nanotechnology per se B82B
• CPC Class Codes: H01L 29/0673 oriented parallel to a substrate
• CPC Class Codes: H01L 29/1606 Graphene
• CPC Class Codes: H01L 29/4908 for thin film semiconductor, e.g. gate of TFT
• CPC Class Codes: H01L 29/7781 with inverted single heterostructure, i.e. with active layer formed on top of wide bandgap layer, e.g. IHEMT
• CPC Class Codes: H01L 29/78684 having a semiconductor body comprising semiconductor materials of Group IV not being silicon, or alloys including an element of the group IV, e.g. Ge, SiN alloys, SiC alloys H01L29/7869 takes precedence

Abstract

Provided is a novel electronic device that comprises graphite, graphene or the like.

An electronic device having a substrate, a layer comprising a 6-member ring-structured carbon homologue as the main ingredient, a pair of electrodes, a layer comprising aluminium oxide as the main ingredient and disposed between the pair of electrodes, and a layer comprising aluminium as the main ingredient, wherein the layer comprising aluminium oxide as the main ingredient is disposed between the layer comprising a 6-member ring-structured carbon homologue as the main ingredient and the layer comprising aluminium as the main ingredient so as to be in contact with the two layers.

Claims

1. An electronic device having a substrate, a layer comprising a 6-member ring-structured carbon homologue as the main ingredient, a pair of electrodes, a layer comprising aluminium oxide as the main ingredient and disposed between the pair of electrodes, and a layer comprising aluminium as the main ingredient, wherein the layer comprising aluminium oxide as the main ingredient is disposed between the layer comprising a 6-member ring-structured carbon homologue as the main ingredient and the layer comprising aluminium as the main ingredient so as to be in contact with the two layers.

2. The electronic device of claim 1, which has, on the substrate, the layer comprising a 6-member ring-structured carbon homologue as the main ingredient, the pair of electrodes, the layer comprising aluminium oxide as the main ingredient, and the layer comprising aluminium as the main ingredient in that order.

3. The electronic device of claim 1, wherein the layer comprising aluminium oxide as the main ingredient is formed by providing the layer comprising a 6-member ring-structured carbon homologue as the main ingredient and the layer comprising aluminium as the main ingredient so as to be in contact with the layer followed by oxidization.

4. The electronic device of claim 1, wherein the layer comprising aluminium oxide as the main ingredient is formed by providing the layer comprising a 6-member ring-structured carbon homologue as the main ingredient and the layer comprising aluminium as the main ingredient so as to be in contact with the layer followed by spontaneous oxidization.

5. The electronic device of claim 1, wherein the thickness of the layer comprising aluminium oxide as the main ingredient is from 1 to 10 nm.

6. The electronic device of claim 1, wherein the thickness of the layer comprising a 6-member ring-structured carbon homologue as the main ingredient is from 0.3 to 10 nm, the thickness of the layer comprising aluminium as the main ingredient is from 10 to 100 nm, and the thickness of the layer comprising aluminium oxide as the main ingredient is from 1 to 10 nm.

7. The electronic device of claim 1, wherein the 6-member ring-structured carbon homologue is graphite, graphene or carbon nanotube.

8. The electronic device of claim 1, wherein the 6-member ring-structured carbon homologue is graphite or graphene.

9. A method for producing an electronic device, comprising providing a layer comprising a 6-member ring-structured carbon homologue as the main ingredient on a substrate, providing a layer comprising aluminium as the main ingredient so as to be in contact with the layer comprising aluminium as the main ingredient, providing a pair of electrodes, and providing a layer comprising aluminium oxide as the main ingredient between the layer comprising a 6-member ring-structure carbon homologue as the main ingredient and the layer comprising aluminium as the main ingredient, through oxidation.

10. The method for producing an electronic device of claim 9, wherein the layer comprising a 6-member ring-structure carbon homologue as the main ingredient, the layer comprising aluminium as the main ingredient and the pair of electrodes are provided in that order on the support.

12. The method for producing an electronic device of claim 9, wherein the oxidization is spontaneous oxidization.

11. (canceled)