SCANNING PROBE MICROSCOPE AND MEASURING METHOD THEREBY
First Claim
1. A measuring method of a scanning probe microscope provided with a cantilever with a probe which is opposite to a sample, a XYZ fine movement mechanism for making displacement in each direction of three axes (two axes X and Y parallel to a sample surface, and an axis Z of a height direction to the sample surface) which intersect perpendicularly in a positional relationship between said probe and said sample, a movement mechanism for changing a relative position of said probe and said sample, a measurement means for measuring surface properties of said sample based on the physical amount generated between said probe and said sample when making said probe scan the surface of said sample, and a displacement detection means for detecting the displacement of said cantilever, wherein surface characteristic of said sample is measured by making said probe scan the surface of said sample while holding said physical amount to be constant, the measuring method characterized in comprising,a first step of performing a first time scanning movement of said probe in both or either of X and Y directions along a surface of said sample while controlling the position of said probe in a Z direction on said sample according to a predetermined probe movement path by said movement mechanism and said XYZ fine movement mechanisms,a second step of obtaining measuring information about the surface of said sample by said measurement means and said displacement detection means during said first step,a third step of determining a probe movement path for a second time scanning and a measuring spot in which a measurement including a parallel direction component to the surface of said sample is performed on said probe movement path, on the basis of said measuring information about the surface of said sample obtained in said second step, anda fourth step of performing the measurement including the parallel direction component based on said second time scanning.
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Abstract
A scanning probe microscope performs first scanning movement of a probe in X and Y directions along a sample surface while controlling the position of the probe in a Z direction by an XYZ fine movement mechanism. Measurement information about the sample surface is obtained by a measurement section and displacement detection section during the first scanning. A probe movement path is determined for a second scanning that includes a measuring spot in which a measurement including a parallel direction component to the sample surface to be performed on the probe movement path is determined, on the basis of the measurement information about the sample surface. As a result of performing the measurement including the parallel direction component based on the second scanning wear of the probe is reduced and measurement reliability and simplified movement control of the scanning of the probe is enabled.
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Citations
16 Claims
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1. A measuring method of a scanning probe microscope provided with a cantilever with a probe which is opposite to a sample, a XYZ fine movement mechanism for making displacement in each direction of three axes (two axes X and Y parallel to a sample surface, and an axis Z of a height direction to the sample surface) which intersect perpendicularly in a positional relationship between said probe and said sample, a movement mechanism for changing a relative position of said probe and said sample, a measurement means for measuring surface properties of said sample based on the physical amount generated between said probe and said sample when making said probe scan the surface of said sample, and a displacement detection means for detecting the displacement of said cantilever, wherein surface characteristic of said sample is measured by making said probe scan the surface of said sample while holding said physical amount to be constant, the measuring method characterized in comprising,
a first step of performing a first time scanning movement of said probe in both or either of X and Y directions along a surface of said sample while controlling the position of said probe in a Z direction on said sample according to a predetermined probe movement path by said movement mechanism and said XYZ fine movement mechanisms, a second step of obtaining measuring information about the surface of said sample by said measurement means and said displacement detection means during said first step, a third step of determining a probe movement path for a second time scanning and a measuring spot in which a measurement including a parallel direction component to the surface of said sample is performed on said probe movement path, on the basis of said measuring information about the surface of said sample obtained in said second step, and a fourth step of performing the measurement including the parallel direction component based on said second time scanning.
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16. A scanning probe microscope provided with a cantilever with a probe which is opposite to a sample, a XYZ fine movement mechanism for making displacement in each direction of three axes (two axes X and Y parallel to a sample surface, and an axis Z of a height direction to the sample surface) which intersect perpendicularly in a positional relationship between said probe and said sample, a movement mechanism for changing a relative position of said probe and said sample, a measurement means for measuring surface properties of said sample based on the physical amount generated between said probe and said sample when making said probe scan the surface of said sample, and a displacement detection means for detecting the displacement of said cantilever, and a control computer for changing a positional relationship between said probe and said sample by said XYZ fine movement mechanism and said movement mechanism, wherein surface characteristic of said sample is measured by making said probe scan the surface of said sample while holding said physical amount to be constant, the scanning probe microscope characterized in that said control computer is installed with a program for realizing,
a first function for performing a first time scanning movement of said probe in both or either of X and Y directions along a surface of said sample while controlling the position of said probe in a Z direction on said sample according to a predetermined probe movement path by said movement mechanism and said XYZ fine movement mechanism, a second function for obtaining measuring information about the surface of said sample by said measurement means and said displacement detection means during said scanning, a third function for determining a probe movement path for a second time scanning and a measuring spot in which a measurement including a parallel direction component to the surface of said sample is performed on said probe movement path, on the basis of said measuring information about the surface of said sample obtained in said measurement, and a fourth function for performing the measurement including the parallel direction component based on said second time scanning.
Specification