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SCANNING PROBE MICROSCOPE AND MEASURING METHOD THEREBY

  • US 20090140142A1
  • Filed: 02/22/2006
  • Published: 06/04/2009
  • Est. Priority Date: 02/23/2005
  • Status: Abandoned Application
First Claim
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1. A measuring method of a scanning probe microscope provided with a cantilever with a probe which is opposite to a sample, a XYZ fine movement mechanism for making displacement in each direction of three axes (two axes X and Y parallel to a sample surface, and an axis Z of a height direction to the sample surface) which intersect perpendicularly in a positional relationship between said probe and said sample, a movement mechanism for changing a relative position of said probe and said sample, a measurement means for measuring surface properties of said sample based on the physical amount generated between said probe and said sample when making said probe scan the surface of said sample, and a displacement detection means for detecting the displacement of said cantilever, wherein surface characteristic of said sample is measured by making said probe scan the surface of said sample while holding said physical amount to be constant, the measuring method characterized in comprising,a first step of performing a first time scanning movement of said probe in both or either of X and Y directions along a surface of said sample while controlling the position of said probe in a Z direction on said sample according to a predetermined probe movement path by said movement mechanism and said XYZ fine movement mechanisms,a second step of obtaining measuring information about the surface of said sample by said measurement means and said displacement detection means during said first step,a third step of determining a probe movement path for a second time scanning and a measuring spot in which a measurement including a parallel direction component to the surface of said sample is performed on said probe movement path, on the basis of said measuring information about the surface of said sample obtained in said second step, anda fourth step of performing the measurement including the parallel direction component based on said second time scanning.

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