PIXEL STRUCTURE HAVING AN UMBRELLA TYPE ABSORBER WITH ONE OR MORE RECESSES OR CHANNELS SIZED TO INCREASE RADIATION ABSORPTION
First Claim
1. A pixel structure for use in an infrared imager, comprising:
- a substrate; and
a bolometer comprising;
a transducer having a spaced apart relationship with respect to said substrate, the transducer having an electrical resistance that varies in response to changes in the temperature of the transducer, andan absorber having a spaced apart relationship with respect to the transducer, the absorber having a thermal connection to the transducer permitting radiation absorbed by the absorber to heat the transducer,wherein the absorber has a top side defining a recess in the absorber, the recess being adapted to affect the propagation path of a portion of radiation received by the absorber such that the radiation portion is absorbed by the absorber rather than exiting the absorber.
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Abstract
A pixel structure for use in an infrared imager is provided. The pixel structure includes a substrate and a bolometer. The bolometer includes a transducer that has a spaced apart relationship with respect to the substrate and has an electrical resistance that varies in response to changes in the temperature of the transducer. The bolometer also includes an absorber that has a spaced apart relationship with respect to the transducer and has a thermal connection to the transducer permitting radiation absorbed by the absorber to heat the transducer. The absorber has a top side defining a recess or channel in the absorber. The recess or channel is adapted to effect the propagation path of a portion of radiation received by the absorber such that the radiation portion is absorbed by the absorber rather than exiting the absorber. The recess or channel also decreases the thermal mass of the bolometer.
47 Citations
18 Claims
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1. A pixel structure for use in an infrared imager, comprising:
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a substrate; and a bolometer comprising; a transducer having a spaced apart relationship with respect to said substrate, the transducer having an electrical resistance that varies in response to changes in the temperature of the transducer, and an absorber having a spaced apart relationship with respect to the transducer, the absorber having a thermal connection to the transducer permitting radiation absorbed by the absorber to heat the transducer, wherein the absorber has a top side defining a recess in the absorber, the recess being adapted to affect the propagation path of a portion of radiation received by the absorber such that the radiation portion is absorbed by the absorber rather than exiting the absorber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 16)
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15. A pixel structure according to claim 15, wherein the bolometer further comprises a post extending between the transducer and the base layer of the absorber for supporting the absorber in the spaced apart relationship with the transducer.
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17. A pixel structure for use in an infrared imager, comprising:
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a substrate; and a bolometer comprising; a transducer having a spaced apart relationship with respect to said substrate, the transducer having an electrical resistance that varies in response to changes in the temperature of the transducer, and an absorber having a spaced apart relationship with respect to the transducer, the absorber having a thermal connection to the transducer permitting radiation absorbed by the absorber to heat the transducer, wherein the absorber has a top side defining a recess in the absorber, the recess being adapted to decrease the thermal mass of the absorber. - View Dependent Claims (18)
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Specification