CONDUCTIVE LINE COMPRISING A CAPPING LAYER
First Claim
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1. A method of forming an integrated circuit, comprising:
- forming a groove in a supporting material;
forming a liner layer in the groove;
forming a first compound comprising a metal over the liner layer in the groove;
removing a portion of the liner layer and the first metal compound corresponding to an upper portion of the groove, wherein the liner layer and the first metal compound remain in a lower portion of the groove; and
forming a capping layer over the first metal compound in the groove, wherein the capping layer comprises a second compound of the metal, the second compound being different than the first metal compound.
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Abstract
An integrated circuit includes a conductive line, the conductive line having a conductive layer made of a metal or a first compound including a metal and a capping layer made of a second compound comprising the metal, the capping layer being in contact with the conductive layer, the first compound being different from the second compound.
11 Citations
22 Claims
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1. A method of forming an integrated circuit, comprising:
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forming a groove in a supporting material; forming a liner layer in the groove; forming a first compound comprising a metal over the liner layer in the groove; removing a portion of the liner layer and the first metal compound corresponding to an upper portion of the groove, wherein the liner layer and the first metal compound remain in a lower portion of the groove; and forming a capping layer over the first metal compound in the groove, wherein the capping layer comprises a second compound of the metal, the second compound being different than the first metal compound. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An integrated circuit comprising a conductive line, comprising:
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an intermediate layer comprising a first metal in contact with a dielectric layer; a conductive layer comprising a first compound comprising a second metal in contact with the intermediate layer; and a capping layer comprising a second compound comprising the second metal in contact with the conductive layer, wherein the first compound is different than the second compound. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. An integrated circuit, formed by the process of:
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forming a groove in a supporting material comprising a semiconductor body; forming a dielectric layer in the groove; forming a liner layer over the dielectric layer in the groove; forming a first metal compound over the liner layer in the groove; removing a portion of the liner layer and the first metal compound corresponding to an upper portion of the groove, wherein the liner layer and the first metal compound remain in a lower portion of the groove; forming a capping layer over the first metal compound in the groove, wherein the capping layer comprises a second metal compound that is different than the first metal compound; and removing any residue on sidewalls of the groove in the upper portion thereof, wherein the first metal compound is protected by the second metal compound during the residue removal. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22)
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Specification