METHODS AND APPARATUS FOR CURING PIXEL MATRIX FILTER MATERIALS

• US 20090141218A1
• Filed: 10/23/2008
• Published: 06/04/2009
• Est. Priority Date: 10/26/2007
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Zhou, Ligui, Shang, Quanyuan
• Application Number:
  US12/257,380
• Publication Number:
  US 20090141218A1
• Time in Patent Office: Days
• US Class Current: 349/106
• CPC Class Codes: G02B 5/201 in the form of arrays
• CPC Class Codes: G02F 1/133516 Methods for their manufacture, e.g. printing, electro-deposition or photolithography
• CPC Class Codes: G03F 7/0007 Filters, e.g. additive colour filters; Components for display devices
• CPC Class Codes: G03F 7/40 Treatment after imagewise removal, e.g. baking

Abstract

In the formation of color filters for flat panel displays, the invention includes concurrently curing and shrinking a pixel matrix and a color material on a substrate to achieve a substantially co-planar top surface. The invention includes applying a first activation energy to a pixel matrix material to render the material partially cured, minimally shrunk, hardened, and chemically ready for the application of a color material; applying the color material; and concurrently shrinking the color material and pixel material by the application of at least an additional activation energy wherein the additional activation energy is greater than the first activation energy. Numerous other aspects are provided.

Claims

1. A method of processing a substrate, the method comprising:

applying a first activation energy to a patterned pixel matrix material on a substrate sufficient to cause the patterned pixel matrix material to attain a first state, wherein the patterned pixel matrix material in the first state includes a minimized change in volume relative to a volume of the patterned pixel matrix material prior to application of the first activation energy and an increased hardness sufficient to withstand inkjetting;

inkjetting a color material onto the substrate; and

applying an additional activation energy to the patterned pixel matrix material sufficient to attain a second state, wherein the patterned pixel matrix material in the second state includes a reduction in the volume of the patterned pixel matrix material and is substantially hardened.

2. The method of claim 1 wherein the first activation energy is less than the additional activation energy.

3. The method of claim 1 wherein an intermediate activation energy is applied to the patterned pixel matrix material after inkjetting the color material but before applying the additional activation energy.

4. The method of claim 3 wherein the intermediate activation energy includes heating the substrate to a temperature less than or about 110°

C.

5. The method of claim 3 wherein the intermediate activation energy is applied for a time less than or about 10 minutes.

6. The method of claim 1 wherein the first activation energy includes heating the substrate to a temperature within a range of about 120°

C. to 200°

C.

7. The method of claim 1 wherein the first activation energy is applied for a time less than or about 5 minutes.

8. The method of claim 1 wherein the additional activation energy includes heating the substrate to a temperature greater than or about 200°

C.

9. The method of claim 1 wherein the additional activation energy is applied for a time of about 10 minutes.

10. The method of claim 1 wherein any of the activation energies is achieved by at least one of applying rapid thermal processing, ultraviolet (UV) radiation, infrared (IR) radiation, electron beam radiation, and laser light radiation.

11. The method of claim 1 wherein the application of the first activation energy to the patterned pixel matrix material initiates solvent removal from the patterned pixel matrix material and initiates cross-linking of the patterned pixel matrix material.

12. The method of claim 1 wherein the patterned pixel material includes an additive with a non-polar portion wherein the application of the first activation energy to a surface of the patterned pixel matrix causes the non-polar portion of the additive to orient toward the surface of the patterned pixel material exposed to the first activation energy.

13. The method of claim 2 wherein the application of the intermediate activation energy to the patterned pixel matrix material removes solvents from the patterned pixel matrix material.

14. The method of claim 1 wherein the application of the additional activation energy to the patterned pixel matrix material crosslinks the patterned pixel matrix material.

15. The method of claim 1 wherein the patterned pixel matrix material includes a top surface and the color material includes a top surface such that after the application of the additional activation energy, the top surface of the color material and the top surface of the patterned pixel matrix material are approximately co-planar.

16. The method of claim 1 wherein the patterned pixel matrix material has at least one side surface and the color material has at least one side surface wherein the at least one side surface of the patterned pixel matrix material and the at least one side surface of the color material meet to form at least one interface such that after the application of the additional activation energy the at least one interface does not include a gap.

17. The method of claim 1 wherein the color material includes ink.

18. A method of processing a substrate, the method comprising:

applying a first activation energy to a patterned pixel matrix material on a substrate sufficient to cause the patterned pixel matrix material to attain a first state, wherein the patterned pixel matrix material in the first state is adapted to withstand inkjetting;

inkjetting a color material onto the substrate; and

applying an additional activation energy to the patterned pixel matrix material sufficient to attain a second state, wherein concurrent shrinking of the patterned pixel matrix material and the color material results in a top surface of the patterned pixel matrix material and a top surface of the color material being approximately co-planar.

19. An apparatus comprising:

a substrate;

a patterned pixel matrix material with a top surface, the patterned pixel matrix material formed on the substrate; and

a color material with a top surface, the color material deposited into the patterned pixel matrix material,

wherein the patterned pixel matrix material and the color material are cured such that concurrent shrinking of the patterned pixel matrix material and the color material results in the top surface of the patterned pixel matrix material and the top surface of the color material being approximately co-planar.

20. The apparatus of claim 19 wherein concurrent shrinking of the patterned pixel matrix material and the color material results in the top surfaces of the patterned pixel matrix material and the top surface of the color material being approximately co-planar without use of a leveling agent.

21. An apparatus of claim 19 including a patterned pixel matrix material with at least one side wall surface;

a color material with at least one side surface;

wherein concurrent shrinking of the patterned pixel matrix material and the color material results in the side surface of the patterned pixel matrix material and the side surface of the color material forming an interface without gaps.

22. The apparatus of claim 19 wherein the color material includes ink.

23. The apparatus of claim 19 wherein the color material is applied by an inkjet process.

24. An apparatus comprising:

a patterned pixel matrix material with a top surface; and

a color material with a top surface,

wherein the top surface of the patterned pixel matrix material and the top surface of the color material are approximately co-planar,

wherein a first activation energy is applied to the patterned pixel matrix prior to an application of the color material,

wherein an additional activation energy is applied concurrently to the patterned pixel matrix material and the color material,

wherein the first application energy is less than the additional activation energy.

25. A system comprising:

a first substrate with a transistor array;

a second substrate having a patterned pixel matrix material with at least one top surface and a color material with at least one top surface wherein the at least one top surface of the patterned pixel matrix material and the at least one top surface of the color material are approximately co-planar;

a sealant for assembling the first substrate and the second substrate;

a spacer separating the first substrate and the second substrate;

a liquid crystal material between the first substrate and the second substrate; and

one or more polarizers adhered to the outside of the first substrate and the second substrate.