Telemetric Sensing Using Micromachined Ultrasonic Transducer

• US 20090141592A1
• Filed: 12/02/2008
• Published: 06/04/2009
• Est. Priority Date: 12/03/2007
• Status: Active Grant

• Current Assignee: Kolo Medical, Ltd.
• Original Assignee: Kolo Technologies, Inc.
• Inventors: Huang, Yongli
• Granted Patent: US 8,767,514 B2
• Time in Patent Office: Days
• US Class Current: 367/181
• CPC Class Codes: A61B 2560/0219 of externally powered implanted units
• CPC Class Codes: A61B 2562/028 Microscale sensors, e.g. electromechanical sensors [MEMS]
• CPC Class Codes: A61B 8/00 Diagnosis using ultrasonic, sonic or infrasonic waves imaging of objects using sonar G01S15/00
• CPC Class Codes: A61B 8/06 Measuring blood flow measuring volume flow in general G01F, e.g. G01F1/66, G01F1/72; measuring speed of fluids in general G01P5/00
• CPC Class Codes: A61B 8/12 in body cavities or body tracts, e.g. by using catheters catheters per se A61M25/00
• CPC Class Codes: A61B 8/4472 Wireless probes
• CPC Class Codes: A61B 8/56 Details of data transmission or power supply
• CPC Class Codes: A61B 8/565 involving data transmission via a network
• CPC Class Codes: A61N 1/37217 characterised by the communication link, e.g. acoustic or tactile
• CPC Class Codes: G01S 15/00 Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
• CPC Class Codes: H04R 23/00 Transducers other than those covered by groups H04R9/00 - H04R21/00 diaphragms for transducers of the distributed-mode type H04R7/045

Abstract

Implementations of a cMUT have a telemetric antenna operative to telemetrically transmit an output signal generated by the cMUT in reception mode (RX). The cMUT generates the output signal by converting a received energy applied on the cMUT. The received energy may be an acoustic wave or a low-frequency pressure signal. The acoustic wave may be generated by a separate acoustic energy source. The cMUT may form a modulated signal using a carrier signal modulated with the output signal, and telemetrically transmit the modulated signal carrying the output signal to increase efficiency. The antenna may also receive an input signal from outside to telemetrically power on the cMUT.

Claims

1. A capacitive micromachined transducer (cMUT) system, comprising:

a cMUT operative in a reception mode (RX) to convert an external energy applied on the cMUT to an output signal; and

a first antenna operative to wirelessly transmit the output signal.

2. The cMUT system of claim 1, further comprising:

an AC signal source for generating a carrier signal which is modulated with the output signal by the cMUT to become a modulated signal carrying the output signal.

3. The cMUT system of claim 2, wherein the antenna is operative to telemetrically transmit the modulated signal carrying the output signal.

4. The cMUT system of claim 1, wherein the external energy comprises an ultrasonic acoustic wave.

5. The cMUT system of claim 1, wherein the external energy comprises a pressure having a frequency substantially lower than an ultrasound frequency range.

6. The cMUT system of claim 5, wherein the frequency of the pressure is in a range of 0 Hz≦

frequency≦

20 kHz.

7. The cMUT system of claim 5, wherein the output signal modulates a carrier signal having a carrier frequency higher than the frequency of the pressure to create a modulated signal.

8. The cMUT system of claim 1, wherein the antenna comprises an inductive member.

9. The cMUT system of claim 8, wherein the inductive member is connected to the cMUT and has an inductance tuned for an impedance of the cMUT.

10. The cMUT system of claim 8, wherein the output signal is modulated with a carrier signal having a carrier frequency to create a modulated signal, and the inductive member and the cMUT form a resonator having a resonant frequency at or around the carrier frequency.

11. The cMUT system of claim 1, the cMUT comprises a cMUT array having a plurality of cMUT elements.

12. The cMUT system of claim 11, wherein the plurality of cMUT elements each have an antenna comprising a respective inductive member.

13. The cMUT system of claim 1, the system further comprising a telemetric circuit including a switch circuit operative to power on the telemetric circuit when triggered by a telemetric signal received by the antenna from outside.

14. The cMUT system of claim 1, wherein the external energy comprises an acoustic wave generated by a separate source.

15. The cMUT system of claim 1, the system being adapted for placement inside a human body for sensing.

16. The cMUT system of claim 1, the system being operative in a transmission mode (TX) to convert an input signal to an actuation energy applied on a medium.

17. The cMUT system of claim 1, further comprising:

a second antenna operative to receive the output signal wirelessly transmitted by the first antenna.

18. A capacitive micromachined transducer (cMUT) system, comprising:

a cMUT operative in at least a reception mode (RX) to convert a received energy applied on the cMUT to an output signal, the cMUT having a first electrode and a second electrode separated from each other by an electrode gap so that a capacitance exists between the first electrode and the second electrode, and a spring member supporting the second electrode for enabling the first electrode and the second electrode to move toward or away from each other;

a first antenna operative to telemetrically transmit the output signal and/or to telemetrically receive an input signal; and

a second antenna operative to receive the output signal telemetrically transmitted by the first antenna and/or transmits the input signal.

19. The cMUT system of claim 18, wherein the cMUT is operative in the reception mode (RX) only, and the input signal is operative to telemetrically power on the cMUT.

20. A capacitive micromachined transducer (cMUT) system, comprising:

at least a cMUT operative in at least a reception mode (RX) to convert a received energy applied on the cMUT to an output signal;

an AC signal source for generating a carrier signal to be modulated with the output signal to become a modulated signal;

a first antenna operative to telemetrically transmit the modulated signal carrying the output signal; and

a second antenna operative to receive the modulated signal telemetrically transmitted by the first antenna.