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Optimal Acoustic Impedance Materials for Polished Substrate Coating to Suppress Passband Ripple in BAW Resonators and Filters

  • US 20090142480A1
  • Filed: 12/04/2007
  • Published: 06/04/2009
  • Est. Priority Date: 12/04/2007
  • Status: Active Grant
First Claim
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1. A method of reducing phase and amplitude ripples in a BAW resonator frequency response comprising:

  • providing a substrate;

    fabricating a Bragg mirror having alternate layers of a high acoustic material and a low acoustic material on a first surface of the substrate;

    fabricating a BAW on the Bragg mirror;

    coating a second side of the substrate opposite the first side with a lossy material having an acoustic impedance in the range of 0.01x to 1.0x the acoustic impedance of the layers of high impedance material;

    the second surface of the substrate being a polished surface.

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