Hydrophobic Surface Coating With Low Wetting Hysteresis, Method for Depositing Same, Microcomponent and Use
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Abstract
A hydrophobic surface coating, preferably obtained by chemical vapor deposition, comprises at least an upper thin layer formed by a compound selected from the group consisting of SiCxOy:H with x comprised between 1.4 and 2 and y comprised between 0.8 and 1.4 and SiCx′Ny′:H with x′ comprised between 1.2 and 1.4 and y′ comprised between 0.6 and 0.8, so as to obtain a free surface with a low wetting hysteresis. Such a hydrophobic surface coating can be arranged on the free surface of a microcomponent comprising at least one substrate provided with, an electrode array and particularly suitable for moving drops of liquid by electrowetting on dielectric.
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Citations
28 Claims
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1-14. -14. (canceled)
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15. A hydrophobic surface coating comprising at least an upper thin layer formed by a compound selected from the group consisting of:
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SiCxOy;
H with x comprised between 1.4 and 2 and y comprised between 0.8 and 1.4and SiCx′
Ny′
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H with x′
comprised between 1.2 and 1.4 and y′
comprised between 0.6 and 0.8,so as to obtain a free surface with a low wetting hysteresis. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification