METHOD FOR MANUFACTURING SOI SUBSTRATE
First Claim
1. A method for manufacturing an SOI substrate, comprising the steps of:
- adding ion species contained in plasma formed by exciting a source gas into a single crystal semiconductor substrate, thereby, forming a damage region in the single crystal semiconductor substrate;
forming an insulating layer over the single crystal semiconductor substrate after forming the damage region;
bonding a support substrate so as to face the single crystal semiconductor substrate with the insulating layer therebetween;
heating the single crystal semiconductor substrate and the support substrate to separate a part of the single crystal semiconductor substrate at the damage region, leaving a single crystal semiconductor layer over the support substrate; and
pressing the single crystal semiconductor layer bonded to the support substrate.
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Accused Products
Abstract
Adhesion defects between a single crystal semiconductor layer and a support substrate are reduced to manufacture an SOI substrate achiving high bonding strength between the single crystal semiconductor layer and the support substrate. Plasma is produced by exciting a source gas, ion species contained in the plasma are added from one surface of a single crystal semiconductor substrate, and thereby forming a damage region in the single crystal semiconductor substrate; forming an insulating layer over one surface of the single crystal semiconductor substrate; a support substrate is bonded so as to face the single crystal semiconductor substrate with the insulating layer therebetween; the single crystal semiconductor substrate is heated to separate the single crystal semiconductor substrate into a single crystal semiconductor layer bonded to the support substrate and a single crystal semiconductor substrate, in the damage region; and the single crystal semiconductor layer bonded to the support substrate is pressed.
407 Citations
24 Claims
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1. A method for manufacturing an SOI substrate, comprising the steps of:
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adding ion species contained in plasma formed by exciting a source gas into a single crystal semiconductor substrate, thereby, forming a damage region in the single crystal semiconductor substrate; forming an insulating layer over the single crystal semiconductor substrate after forming the damage region; bonding a support substrate so as to face the single crystal semiconductor substrate with the insulating layer therebetween; heating the single crystal semiconductor substrate and the support substrate to separate a part of the single crystal semiconductor substrate at the damage region, leaving a single crystal semiconductor layer over the support substrate; and pressing the single crystal semiconductor layer bonded to the support substrate. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method for manufacturing an SOI substrate, comprising the steps of:
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adding ion species contained in plasma formed by exciting a source gas into a single crystal semiconductor substrate, thereby, forming a damage region in the single crystal semiconductor substrate; forming an insulating layer over the single crystal semiconductor substrate after forming the damage region; bonding a support substrate so as to face the single crystal semiconductor substrate with the insulating layer therebetween; heating the single crystal semiconductor substrate and the support substrate to separate a part of the single crystal semiconductor substrate at the damage region, leaving a single crystal semiconductor layer over the support substrate; forming a plurality of island-shaped single crystal semiconductor layers by etching the single crystal semiconductor layer; and pressing the plurality of island-shaped single crystal semiconductor layers. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A method for manufacturing an SOI substrate, comprising the steps of:
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adding ion species contained in plasma formed by exciting a source gas into a single crystal semiconductor substrate, thereby, forming a damage region in the single crystal semiconductor substrate; forming an insulating layer over the single crystal semiconductor substrate after forming the damage region; forming an opening which is deeper than the damage region in the insulating layer and the single crystal semiconductor substrate by etching the single crystal semiconductor substrate and the insulating layer; bonding a support substrate so as to face the single crystal semiconductor substrate with the insulating layer therebetween; heating the single crystal semiconductor substrate and the support substrate to separate a part of the single crystal semiconductor substrate at the damage region, leaving a plurality of single crystal semiconductor layers over the support substrate; and pressing the plurality of single crystal semiconductor layers bonded to the support substrate. - View Dependent Claims (14, 15, 16, 17, 18)
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19. A method for manufacturing an SOI substrate, comprising the steps of:
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adding ion species contained in plasma formed by exciting a source gas into a single crystal semiconductor substrate, thereby, forming a damage region in the single crystal semiconductor substrate; forming an insulating layer over the single crystal semiconductor substrate after forming the damage region; bonding a support substrate so as to face the single crystal semiconductor substrate with the insulating layer therebetween; heating the single crystal semiconductor substrate and the support substrate to separate a part of the single crystal semiconductor substrate at the damage region, leaving a single crystal semiconductor layer over the support substrate; pressing the single crystal semiconductor layer bonded to the support substrate; and irradiating the single crystal semiconductor layer with a laser beam. - View Dependent Claims (20, 21, 22, 23, 24)
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Specification