METHOD AND APPARATUS FOR MONITORING OPTICAL PROXIMITY CORRECTION PERFORMANCE
First Claim
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1. A method, comprising:
- specifying a plurality of optical proximity correction metrology sites on a wafer;
collecting metrology data from at least a subset of the metrology sites;
predicting data values for the subset of the metrology sites using an optical proximity correction design model;
comparing the collected metrology data to the predicted data values to generate an optical proximity correction metric; and
identifying a problem condition associated with the optical proximity correction design model based on the optical proximity correction metric.
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Abstract
A method includes specifying a plurality of optical proximity correction metrology sites on a wafer. Metrology data is collected from at least a subset of the metrology sites. Data values are predicted for the subset of the metrology sites using an optical proximity correction design model. The collected metrology data is compared to the predicted data values to generate an optical proximity correction metric. A problem condition associated with the optical proximity correction design model is identified based on the optical proximity correction metric.
11 Citations
23 Claims
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1. A method, comprising:
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specifying a plurality of optical proximity correction metrology sites on a wafer; collecting metrology data from at least a subset of the metrology sites; predicting data values for the subset of the metrology sites using an optical proximity correction design model; comparing the collected metrology data to the predicted data values to generate an optical proximity correction metric; and identifying a problem condition associated with the optical proximity correction design model based on the optical proximity correction metric. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method, comprising:
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specifying a plurality of optical proximity correction metrology sites on a wafer; collecting metrology data from at least a subset of the metrology sites; comparing the collected metrology data to predicted data values for the associated metrology sites to generate an optical proximity correction metric; and determining at least one operating recipe parameter for a photolithography tool operable to process the wafers based on the optical proximity correction metric. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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19. A system, comprising:
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a metrology tool operable to collect metrology data from at least a subset of optical proximity correction metrology sites specified on a wafer; and an optical proximity correction monitor operable to predict data values for the subset of the metrology sites using an optical proximity correction design model, compare the collected metrology data to the predicted data values to generate an optical proximity correction metric, and identify a problem condition associated with the optical proximity correction design model based on the optical proximity correction metric. - View Dependent Claims (20)
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21. A system, comprising:
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a photolithography tool operable to pattern wafers for forming features thereon; a metrology tool operable to collect metrology data from at least a subset of optical proximity correction metrology sites specified on at least one wafer; and a controller operable to compare the collected metrology data to predicted data values for the associated metrology sites to generate an optical proximity correction metric and determine at least one operating recipe parameter for the photolithography tool based on the optical proximity correction metric. - View Dependent Claims (22, 23)
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Specification