FABRICATING AN ARRAY OF MEMS PARTS ON A SUBSTRATE
First Claim
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1. A method comprising:
- fabricating a micro-electro-mechanical system (MEMS) part on a substrate, the MEMS part being connected to a structure on the substrate at an anchor point;
detaching the MEMS part from the structure at or near the anchor point with force to remove the MEMS part from the substrate; and
after removing the MEMS part from the substrate, attaching the MEMS part to an application platform.
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Abstract
A method for fabricating a micro-electro-mechanical system (MEMS) device. The method comprises fabricating a MEMS part on a substrate, and detaching the MEMS part from the substrate. After detaching the MEMS part from the substrate, attaching the MEMS part to an application platform.
62 Citations
20 Claims
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1. A method comprising:
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fabricating a micro-electro-mechanical system (MEMS) part on a substrate, the MEMS part being connected to a structure on the substrate at an anchor point; detaching the MEMS part from the structure at or near the anchor point with force to remove the MEMS part from the substrate; and after removing the MEMS part from the substrate, attaching the MEMS part to an application platform. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method comprising:
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forming a sacrificial layer on a substrate; forming an island connecting to a micro-electro-mechanical system (MEMS) part on the sacrificial layer; removing the sacrificial layer except a portion of the sacrificial layer located between the island and the substrate; detaching the MEMS part from the substrate; and after detaching the MEMS part from the substrate, attaching the MEMS part to an application platform. - View Dependent Claims (11, 12, 13, 14, 15)
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16. An apparatus comprising:
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an application platform; and a micro-electro-mechanical system (MEMS) part on the application platform, the MEMS part having a broken surface formed by detaching the MEMS part with force from a substrate on which the MEMS part was fabricated, and a bonding surface to attach to the application platform. - View Dependent Claims (17, 18, 19, 20)
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Specification