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FABRICATING AN ARRAY OF MEMS PARTS ON A SUBSTRATE

  • US 20090144970A1
  • Filed: 12/06/2007
  • Published: 06/11/2009
  • Est. Priority Date: 12/06/2007
  • Status: Abandoned Application
First Claim
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1. A method comprising:

  • fabricating a micro-electro-mechanical system (MEMS) part on a substrate, the MEMS part being connected to a structure on the substrate at an anchor point;

    detaching the MEMS part from the structure at or near the anchor point with force to remove the MEMS part from the substrate; and

    after removing the MEMS part from the substrate, attaching the MEMS part to an application platform.

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