METHOD FOR PROCESSING DETECTION SIGNAL OF VIBRATORY INERTIAL FORCE SENSOR AND VIBRATORY INERTIAL FORCE SENSOR
First Claim
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1. A method for processing a detection signal of vibratory inertial force sensor, which sensor comprises:
- a drive arm;
a driver disposed to the drive arm for vibrating the drive arm;
a sensor section for generating a detection signal through deflection produced by inertial force applied to the drive arm;
a monitor for monitoring the vibration of the drive arm;
a drive control circuit for controlling an amount of vibration of the drive arm; and
a detection circuit for processing the detection signal, the method, to be implemented in the detection circuit, comprising the steps of;
differentially amplifying two detection signals detected by the sensor section and having a phase difference of 180 degrees;
synchronously wave-detecting the differentially amplified signals with a monitor signal supplied from the monitor;
removing harmonic component from the signals synchronously wave-detected;
amplifying the signals from which the harmonic component is removed; and
thensmoothing the amplified signals.
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Abstract
A method for processing a detection signal of a vibratory inertial force sensor is disclosed. This method improves detection accuracy of the vibratory inertial force sensor. A detection circuit of the vibratory inertial force sensor removes harmonic component from signals synchronously wave-detected, and amplifies the resultant signals, and then smoothes the amplified signals. A vibratory inertial force sensor adopting this method is also disclosed.
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Citations
2 Claims
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1. A method for processing a detection signal of vibratory inertial force sensor, which sensor comprises:
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a drive arm; a driver disposed to the drive arm for vibrating the drive arm; a sensor section for generating a detection signal through deflection produced by inertial force applied to the drive arm; a monitor for monitoring the vibration of the drive arm; a drive control circuit for controlling an amount of vibration of the drive arm; and a detection circuit for processing the detection signal, the method, to be implemented in the detection circuit, comprising the steps of; differentially amplifying two detection signals detected by the sensor section and having a phase difference of 180 degrees; synchronously wave-detecting the differentially amplified signals with a monitor signal supplied from the monitor; removing harmonic component from the signals synchronously wave-detected; amplifying the signals from which the harmonic component is removed; and
thensmoothing the amplified signals.
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2. A vibratory inertial force sensor comprising:
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a drive arm; a driver disposed to the drive arm for vibrating the drive arm; a sensor section for generating a detection signal through deflection produced by inertial force applied to the drive arm; a monitor for monitoring the vibration of the drive arm; a drive control circuit for controlling an amount of vibration of the drive arm; and a detection circuit for processing the detection signal, wherein, the detection circuit differentially amplifies two detection signals detected by the sensor section and having a phase difference of 180 degrees, and synchronously wave-detects the differentially amplified signals with a monitor signal supplied from the monitor, removes harmonic component from the signals synchronously wave-detected, amplifies the signals from which the harmonic component is removed, and then smoothes the amplified signals.
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Specification