Proximity head with angled vacuum conduit system, apparatus and method

• US 20090145464A1
• Filed: 03/30/2007
• Published: 06/11/2009
• Est. Priority Date: 03/30/2007
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Korolik, Mikhail, de Larios, John M., Redeker, Fred C., Freer, Erik M., Ravkin, Michael
• Granted Patent: US 7,975,708 B2
• Time in Patent Office: Days
• US Class Current: 134/21
• CPC Class Codes: H01L 21/67051 using mainly spraying means, e.g. nozzles

Abstract

A proximity head including a head surface. The head surface including a first flat region and a plurality of first conduits. Each one of the plurality of first conduits being defined by corresponding one of a plurality of first discrete holes. The plurality of first discrete holes residing in the head surface and extending through the first flat region. The head surface also including a second flat region and a plurality of second conduits. The plurality of second conduits being defined by a corresponding plurality of second discrete holes that reside in the head surface and extend through the second flat region. The head surface also including a third flat region disposed between and adjacent to the first flat region and the second flat region and a plurality of third conduits. The plurality of third conduits being defined by a corresponding plurality of third discrete holes that reside in the head surface and extend through the third flat region. The third conduits being formed at a first angle relative to the third flat region. The first angle being between 30 and 60 degrees. A system and method for processing a substrate with a proximity head is also described.

Claims

1. A proximity head comprising:

a head surface, the head surface including;

a first flat region and a plurality of first conduits, each one of the plurality of first conduits being defined by corresponding one of a plurality of first discrete holes, the plurality of first discrete holes residing in the head surface and extending through the first flat region;

a second flat region and a plurality of second conduits, the plurality of second conduits being defined by a corresponding plurality of second discrete holes that reside in the head surface and extend through the second flat region; and

a third flat region disposed between and adjacent to the first flat region and the second flat region, a plurality of third conduits, the plurality of third conduits being defined by a corresponding plurality of third discrete holes that reside in the head surface and extend through the third flat region wherein the third conduits being formed at a first angle relative to the third flat region, the first angle being between 30 and 60 degrees.

2. The proximity head of claim 1, wherein the first conduits are coupled to a first liquid source and provide the first liquid to the head surface, wherein the plurality of second conduits are coupled to a second fluid source and provide the second fluid to the head surface and wherein the plurality of third conduits are coupled to a vacuum source and provide a vacuum to the head surface.

3. The proximity head of claim 1, wherein the third discrete holes are formed along a trailing edge.

4. The proximity head of claim 1, wherein the first conduits being formed at a first angle relative to the first flat region, the second angle being between 30 and 60 degrees.

5. The proximity head of claim 1, wherein the first discrete holes are formed in a first row and wherein the second discrete holes are formed in a second row and wherein the third discrete holes are formed in a third row, the first row, the second row and the third row being substantially parallel and wherein the third row is disposed between the first row and the second row.

6. The proximity head of claim 5, wherein the second conduits being formed at a second angle relative to the second flat region, the second angle being between 30 and 60 degrees, wherein the second conduits are directed away from the third row.

7. The proximity head of claim 5, further comprising a fourth flat region being disposed on the opposing side of the first row from the third row, the fourth flat region being in a plane substantially parallel to and offset from the first flat region.

8. The proximity head of claim 5, wherein the second row and the third row are separated by a distance of between about 0.5 inches and about 0.75 inches.

9. The proximity head of claim 5, wherein the third flat region being in a plane substantially parallel to and offset from the first flat region.

10. The proximity head of claim 9, wherein the offset between the third flat region and the first flat region is between about 0.020 inches to about 0.080 inches.

11. The proximity head of claim 10, wherein the third row is formed in the third flat region at the offset to the first flat region.

12. The proximity head of claim 1, wherein the third discrete holes are chamfered.

13. The proximity head of claim 1, further comprising a first chamber coupled to the first conduits, a second chamber coupled to the second conduits and a third chamber coupled to the third conduits.

14. A proximity head comprising:

a head surface, the head surface including;

a first flat region and a plurality of first conduits, each one of the plurality of first conduits being defined by corresponding one of a plurality of first discrete holes, the plurality of first discrete holes residing in the head surface and extending through the first flat region;

a second flat region and a plurality of second conduits, the plurality of second conduits being defined by a corresponding plurality of second discrete holes that reside in the head surface and extend through the second flat region; and

a third flat region disposed between and adjacent to the first flat region and the second flat region, a plurality of third conduits, the plurality of third conduits being defined by a corresponding plurality of third discrete holes that reside in the head surface and extend through the third flat region wherein the third conduits being formed at a first angle relative to the third flat region, the first angle being between 30 and 60 degrees, wherein the third discrete holes are formed along a trailing edge, a fourth flat region being disposed on the opposing side of the first row from the third row, the fourth flat region being in a plane substantially parallel to and offset from the first flat region, wherein the third flat region being in a plane substantially parallel to and offset from the first flat region.

15. A method for making a proximity head comprising:

forming a first chamber in a proximity head;

forming a second chamber in the proximity head;

forming a third chamber in the proximity head;

forming a plurality of first conduits from a head surface to the first chamber;

forming a plurality of second conduits from a head surface to the second chamber; and

forming a plurality of third conduits from a head surface to the third chamber, wherein the third conduits being formed at a first angle relative to the head surface, the first angle being between 30 and 60 degrees.

16. The method of claim 15, further comprising:

forming a first flat region on the head surface;

forming a second flat region on the head surface;

forming a third flat region on the head surface, the third flat region being disposed between and adjacent to the first flat region and the second flat region, wherein the third flat region being in a plane substantially parallel to and offset from the first flat region.

17. The method of claim 15, further comprising forming a fourth flat region, the fourth flat region being in a plane substantially parallel to and offset from the first flat region.

18. The method of claim 15, wherein the proximity head is formed from a single work piece.

19. A method of processing a substrate with a proximity head comprising:

placing a proximity head in close proximity to a surface of the substrate and in a first plane substantially parallel to the substrate surface;

forming a liquid meniscus between a first flat region of a head surface of the proximity head and the substrate surface; and

applying a vacuum to a trailing edge of the liquid meniscus, wherein the vacuum draws a substantially continuous flow of liquid from the liquid meniscus.

20. The method of claim 19, wherein the liquid meniscus includes a leading edge and wherein the head surface includes a second flat region, the second flat region being in a plane substantially parallel to and offset from the first flat region, wherein the second flat region is offset to be nearer to the substrate surface than the first flat region and wherein the liquid meniscus includes a leading edge formed between the second flat region and the substrate surface.