CIRCUIT MEMBER, MANUFACTURING METHOD OF THE CIRCUIT MEMBER, AND SEMICONDUCTOR DEVICE INCLUDING THE CIRCUIT MEMBER
First Claim
1. A circuit member comprising a lead frame material including a die pad, a lead part adapted to be electrically connected with a semiconductor chip to be mounted on the die pad, and an outer frame configured to support the die pad and the lead part, the lead frame material being formed from a rolled copper plate or a rolled copper-alloy plate,wherein the lead frame material includes a resin sealing region to be sealed by a resin, together with the semiconductor chip mounted on the die pad,wherein the lead frame material includes a roughened face, having an average roughness Ra of 0.3 μ
- m or greater, formed on a surface in the resin sealing region of the lead frame material, and a flat and smooth face, having the average roughness Ra less than that of the roughened face, on a surface outside the resin sealing region of the lead frame material, andwherein a two-layer plated layer formed by laminating a Ni plated layer and a Pd plated layer in this order, or a three-layer plated layer formed by laminating the Ni plated layer, the Pd plated layer and an Au plated layer in this order, is provided on a whole surface of the lead frame material.
1 Assignment
0 Petitions
Accused Products
Abstract
A circuit member 20 includes a lead frame material 1 having a die pad 3, a lead part 6 to be electrically connected with a semiconductor chip 30, and an outer frame 2 configured to support the die pad and the lead part. The lead frame material includes a resin sealing region 9. Roughened faces 10A to 10C and 11A to 11C, each having an average roughness Ra of 0.3 μm or greater, are formed on a surface in the resin sealing region of the lead frame material. The surface of the lead frame material except for the resin sealing region is a flat and smooth face. A two-layer plated layer 12A formed by laminating a Ni plated layer 13 and a Pd plated layer 14 in this order or a three-layer plated layer 12B formed by laminating the Ni plated layer 13, the Pd plated layer 14 and an Au plated layer 15 in this order is formed on the whole surface of the lead frame material.
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Citations
26 Claims
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1. A circuit member comprising a lead frame material including a die pad, a lead part adapted to be electrically connected with a semiconductor chip to be mounted on the die pad, and an outer frame configured to support the die pad and the lead part, the lead frame material being formed from a rolled copper plate or a rolled copper-alloy plate,
wherein the lead frame material includes a resin sealing region to be sealed by a resin, together with the semiconductor chip mounted on the die pad, wherein the lead frame material includes a roughened face, having an average roughness Ra of 0.3 μ - m or greater, formed on a surface in the resin sealing region of the lead frame material, and a flat and smooth face, having the average roughness Ra less than that of the roughened face, on a surface outside the resin sealing region of the lead frame material, and
wherein a two-layer plated layer formed by laminating a Ni plated layer and a Pd plated layer in this order, or a three-layer plated layer formed by laminating the Ni plated layer, the Pd plated layer and an Au plated layer in this order, is provided on a whole surface of the lead frame material. - View Dependent Claims (2, 3, 4, 5, 6)
- m or greater, formed on a surface in the resin sealing region of the lead frame material, and a flat and smooth face, having the average roughness Ra less than that of the roughened face, on a surface outside the resin sealing region of the lead frame material, and
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7. A circuit member comprising a lead frame material including a die pad, a lead part adapted to be electrically connected via a bonding wire with a semiconductor chip to be mounted on the die pad, and an outer frame configured to support the die pad and the lead part, the lead frame material being formed from a rolled copper plate or a rolled copper-alloy plate,
wherein the lead frame material includes a resin sealing region to be sealed by a resin, together with the semiconductor chip mounted on the die pad and the bonding wire, wherein a single plated layer composed of an Ag plated layer, a two-layer plated layer formed by laminating a Ni plated layer and a Pd plated layer in this order, or a three-layer plated layer formed by laminating the Ni plated layer, the Pd plated layer and an Au plated layer in this order, is provided on a surface of the die pad opposed to the semiconductor chip as well as on a portion, to be connected with the bonding wire, of a surface of the lead part, and wherein the lead frame material includes a roughened face formed on a portion, on which no plated layer is formed, of a surface in the resin sealing region of the lead frame material, the roughened face having an average roughness Ra of 0.3 μ - m or greater, and a flat and smooth face, having the average roughness Ra less than that of the roughened face, on a surface outside the resin sealing region of the lead frame material.
- View Dependent Claims (8, 9, 10, 11, 12)
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13. A manufacturing method for a circuit member, comprising the steps of:
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providing a lead frame material made from a rolled copper plate or a rolled copper-alloy plate, the lead frame material including a die pad, a lead part adapted to be electrically connected with a semiconductor chip to be mounted on the die pad, and an outer frame configured to support the die pad and the lead part; forming a roughened face, having an average roughness Ra of 0.3 μ
m or greater, on a surface in a resin sealing region of the lead frame material by using a micro-etching liquid mainly containing hydrogen peroxide and sulfuric acid, the resin sealing region being adapted to be sealed by a resin together with the semiconductor chip mounted on the die pad; andforming a two-layer plated layer formed by laminating a Ni plated layer and a Pd plated layer in this order, or a three-layer plated layer formed by laminating the Ni plated layer, the Pd plated layer and an Au plated layer in this order, on a whole surface of the lead frame material in which the roughened face is partially formed. - View Dependent Claims (14, 15, 16, 17)
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18. A manufacturing method for a circuit member, comprising the steps of:
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providing a lead frame material made from a rolled copper plate or a rolled copper-alloy plate, the lead frame material including a die pad, a lead part adapted to be electrically connected via bonding wire with a semiconductor chip to be mounted on the die pad, and an outer frame configured to support the die pad and the lead part; forming a single plated layer composed of an Ag plated layer, a two-layer plated layer formed by laminating a Ni plated layer and a Pd plated layer in this order, or a three-layer plated layer formed by laminating the Ni plated layer, the Pd plated layer and an Au plated layer in this order, on a surface of the die pad opposed to the semiconductor chip as well as on a portion, to be connected with the bonding wire, of a surface of the lead part; and forming a roughened face having an average roughness Ra of 0.3 μ
m or greater on a portion, on which no plated layer is formed, of a surface in a resin sealing region of the lead frame material by using a micro-etching liquid mainly containing hydrogen peroxide and the sulfuric acid, the resin sealing region being adapted to be sealed by a resin, together with the semiconductor chip located on the die pad and the bonding wire. - View Dependent Claims (19, 20, 21, 22)
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23. A semiconductor device comprising:
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a semiconductor chip; a circuit member including a lead frame material having a die pad onto which the semiconductor chip is mounted, and a lead part electrically connected with the semiconductor chip located on the die pad, the lead frame material being formed from a rolled copper plate or a rolled copper-alloy plate; a bonding wire electrically connecting the semiconductor chip located on the die pad with the lead part; and an electrically insulating sealing resin sealing the circuit member, the semiconductor chip and the bonding wire, such that a portion of the lead part of the circuit member can be exposed, wherein the lead frame material includes a resin sealing region sealed by the sealing resin, together with the semiconductor chip located on the die pad, wherein the lead frame material includes a roughened face, having an average roughness Ra of 0.3 μ
m or greater, formed on a surface in the resin sealing region of the lead frame material, and a flat and smooth face, having the average roughness Ra less than that of the roughened face, on a surface outside the resin sealing region of the lead frame material, andwherein a two-layer plated layer formed by laminating a Ni plated layer and a Pd plated layer in this order, or a three-layer plated layer formed by laminating the Ni plated layer, the Pd plated layer and an Au plated layer in this order, is provided on a whole surface of the lead frame material. - View Dependent Claims (24)
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25. A semiconductor device comprising:
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a semiconductor chip; a circuit member including a lead frame material having a die pad onto which the semiconductor chip is mounted, and a lead part electrically connected with the semiconductor chip located on the die pad, the lead frame material being formed from a rolled copper plate or a rolled copper-alloy plate; a bonding wire electrically connecting the semiconductor chip located on the die pad with the lead part; and an electrically insulating sealing resin sealing the circuit member, the semiconductor chip and the bonding wire, such that a portion of the lead part of the circuit member can be exposed, wherein a single plated layer composed of an Ag plated layer, a two-layer plated layer formed by laminating a Ni plated layer and a Pd plated layer in this order, or a three-layer plated layer formed by laminating the Ni plated layer, the Pd plated layer and an Au plated layer in this order, is provided on a surface of the die pad opposed to the semiconductor chip as well as on a portion, connected with the bonding wire, of a surface of the lead part, and wherein the lead frame material includes a resin sealing region sealed by the sealing resin, together with the semiconductor chip located on the die pad, wherein the lead frame material includes a roughened face formed on a portion, on which no plated layer is formed, of a surface in the resin sealing region of the lead frame material, the roughened face having an average roughness Ra of 0.3 μ
m or greater, and a flat and smooth face, having the average roughness Ra less than that of the roughened face, on a surface outside the resin sealing region of the lead frame material, andwherein a solder plated layer is formed on a surface of the exposed portion of the lead part. - View Dependent Claims (26)
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Specification