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Exposure apparatus, manufacturing method thereof, and maintenance method of exposure apparatus

  • US 20090147228A1
  • Filed: 12/10/2008
  • Published: 06/11/2009
  • Est. Priority Date: 12/11/2007
  • Status: Abandoned Application
First Claim
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1. A manufacturing method of an exposure apparatus that uses a projection optical system to project an image of a pattern, the method comprising:

  • upwardly moving the projection optical system to position the projection optical system at a predetermined position; and

    supporting the positioned projection optical system.

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