Exposure apparatus, manufacturing method thereof, and maintenance method of exposure apparatus
First Claim
Patent Images
1. A manufacturing method of an exposure apparatus that uses a projection optical system to project an image of a pattern, the method comprising:
- upwardly moving the projection optical system to position the projection optical system at a predetermined position; and
supporting the positioned projection optical system.
1 Assignment
0 Petitions
Accused Products
Abstract
A projection optical system PL is used to project an image of a pattern. A manufacturing method of an exposure apparatus includes: a positioning step of positioning the projection optical system at a predetermined position; and a support step of supporting the positioned projection optical system. The positioning step includes a step of moving the projection optical system upward from below at the time of positioning.
-
Citations
24 Claims
-
1. A manufacturing method of an exposure apparatus that uses a projection optical system to project an image of a pattern, the method comprising:
-
upwardly moving the projection optical system to position the projection optical system at a predetermined position; and supporting the positioned projection optical system. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
-
9. A maintenance method of an exposure apparatus that uses a projection optical system to project an image of a pattern, the method comprising
uninstalling the projection optical system from the exposure apparatus, the un-installation comprising downwardly moving the projection optical system supported by a support member.
-
17. An exposure apparatus that uses a projection optical system to project an image of a pattern, comprising:
-
a support structure that supports a projection optical system; and an opening portion via which the projection optical system is carried out in a horizontal direction, the opening portion being located lower than the projection optical system supported by the support structure. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24)
-
Specification