Beam transforming element, illumination optical apparatus, exposure apparatus, and exposure method with two optical elements having different thicknesses
First Claim
1. An apparatus which illuminates a surface to be illuminated with radiation from a radiation source, the apparatus comprising:
- an optical member having a first portion of a first thickness along an optical axis direction of the apparatus and a second portion of a second thickness along the optical axis direction of the apparatus, whereinthe first and second portion thicknesses are different from each other, and the optical member is made of an optical material with optical activity.
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Accused Products
Abstract
A beam transforming element for forming a predetermined light intensity distribution on a predetermined surface on the basis of an incident beam includes a first basic element made of an optical material with optical activity, for forming a first region distribution of the predetermined light intensity distribution on the basis of the incident beam; and a second basic element made of an optical material with optical activity, for forming a second region distribution of the predetermined light intensity distribution on the basis of the incident beam, wherein the first basic element and the second basic element have their respective thicknesses different from each other along a direction of transmission of light.
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Citations
74 Claims
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1. An apparatus which illuminates a surface to be illuminated with radiation from a radiation source, the apparatus comprising:
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an optical member having a first portion of a first thickness along an optical axis direction of the apparatus and a second portion of a second thickness along the optical axis direction of the apparatus, wherein the first and second portion thicknesses are different from each other, and the optical member is made of an optical material with optical activity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 68, 69)
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49. An exposure method comprising:
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supplying radiation; passing the radiation through an optical member made of an optical material with optical activity, the optical member including a first thickness along a traveling direction of an incident radiation and a second thickness along a traveling direction of an incident radiation, the first and second thicknesses are different from each other; illuminating a pattern with radiation that has passed through the optical member; and projecting an image of the pattern using the radiation with which the pattern was illuminated. - View Dependent Claims (50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 70)
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60. An exposure method comprising:
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supplying radiation; folding the supplied radiation; passing the folded radiation through an optical member made of an optical material with optical activity, the optical member including a first portion having a first thickness along a traveling direction of an incident radiation and a second portion having a second thickness along a traveling direction of an incident radiation, the first and second portions having thicknesses that are different from each other; folding the radiation that has passed through the optical member; illuminating a pattern by use of the folded radiation that has passed through the optical member; and projecting an image of the pattern using the radiation with which the pattern was illuminated. - View Dependent Claims (61, 62, 63, 71, 72)
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64. An exposure method comprising:
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supplying radiation; passing the supplied radiation through a polarization state converter; passing the radiation from the polarization state converter through an optical member made of an optical material with optical activity, the optical member including a first thickness along a traveling direction of an incident radiation and a second thickness along a traveling direction of an incident radiation, and the first and second thicknesses being different from each other; illuminating a pattern with the radiation that has passed through the optical member; and projecting an image of the pattern image using the radiation with which the pattern was illuminated. - View Dependent Claims (65, 66, 67, 73, 74)
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Specification