METHOD FOR TESTING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR DEVICE TESTING SYSTEM
First Claim
1. A method for testing a semiconductor device, the method comprising:
- irradiating a transistor within the semiconductor device with a light beam, wherein the irradiating the transistor induces a current within the transistor; and
in response to the irradiating, detecting photon emission from the transistor.
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Abstract
A method for testing a semiconductor device includes irradiating a transistor within the semiconductor device with a light beam, where the irradiating the transistor induces a current within the transistor, and, in response to the irradiating, detecting photon emission from the transistor. A semiconductor device testing system includes a light beam emitter which provides a light beam to a device under test (DUT) to induce a current in the DUT, a filter which receives a photon emission from the DUT and removes from the photon emission a reflected light beam that is reflected from the DUT to provide a filtered photon emission, and a photon detector which detects the filtered photon emission.
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Citations
25 Claims
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1. A method for testing a semiconductor device, the method comprising:
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irradiating a transistor within the semiconductor device with a light beam, wherein the irradiating the transistor induces a current within the transistor; and in response to the irradiating, detecting photon emission from the transistor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 10, 21, 22, 23, 24, 25)
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9. A method for testing a semiconductor device, the method comprising:
iteratively executing a plurality of test vectors on the semiconductor device, wherein during each iteration of the executing the plurality of test vectors, the method further comprises; irradiating a transistor within the semiconductor device with a light beam, wherein the irradiating the transistor induces a current within the transistor; detecting photon emission from the transistor; and accumulating a photon count from the detected photon emission. - View Dependent Claims (11, 12, 13, 14)
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15-20. -20. (canceled)
Specification