ACTUATOR, OPTICAL HEAD DEVICE, AND OPTICAL INFORMATION DEVICE
First Claim
Patent Images
1. A microarray comprising a two-dimensional array of actuators, each actuator having:
- a base;
a movable section capable of displacement relative to the base;
an elastic supporting member for supporting the movable section; and
a stationary electrode portion formed on the base so as to oppose the movable section, wherein,at least one of the actuators in the microarray disposed in a light-irradiated region includes an optical modulation section having a light reflecting surface for reflecting light on the movable section; and
at least one of the actuators in the microarray disposed outside the light-irradiated region includes a detection section for detecting a physical condition from an amount of displacement between the movable section and the stationary electrode portion.
2 Assignments
0 Petitions
Accused Products
Abstract
An optical head device according to the present invention includes: a light source for outputting laser light; an optical system for allowing the laser light to be radiated onto an optical disk medium; and an aberration correction section for correcting an aberration of the laser light. The aberration correction section includes: a plurality of mirror sections for reflecting the laser light; a plurality of mirror driving sections for displacing the plurality of mirror sections; and a detection section for detecting a physical condition within the optical head device.
-
Citations
32 Claims
-
1. A microarray comprising a two-dimensional array of actuators, each actuator having:
-
a base; a movable section capable of displacement relative to the base; an elastic supporting member for supporting the movable section; and a stationary electrode portion formed on the base so as to oppose the movable section, wherein, at least one of the actuators in the microarray disposed in a light-irradiated region includes an optical modulation section having a light reflecting surface for reflecting light on the movable section; and at least one of the actuators in the microarray disposed outside the light-irradiated region includes a detection section for detecting a physical condition from an amount of displacement between the movable section and the stationary electrode portion. - View Dependent Claims (3, 4, 5, 9)
-
-
2. (canceled)
-
6-8. -8. (canceled)
-
10. An optical head device comprising:
-
a light source for outputting laser light; an optical system for allowing the laser light to be radiated onto an optical disk medium; and an aberration correction section for correcting an aberration of the laser light, wherein, the aberration correction section includes a microarray comprising a two-dimensional array of a plurality of actuators; at least one of the plurality of actuators reflects the laser light; and the aberration correction section further includes a detection section for detecting a physical condition within the optical head device. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
-
-
26. A microarray comprising a two-dimensional array of actuators, each actuator having:
-
a base; a movable section capable of displacement relative to the base; an elastic supporting member for supporting the movable section; and a piezoelectric member for displacing the movable section, wherein, at least one of the actuators in the microarray disposed in a light-irradiated region includes an optical modulation section having a light reflecting surface for reflecting light on the movable section; and at least one of the actuators in the microarray disposed outside the light-irradiated region includes a detection section for detecting a physical condition from a strain of the piezoelectric member. - View Dependent Claims (27, 28, 29, 30, 31)
-
-
32. A method for producing an actuator in which an electrostatic attraction occurring between a movable electrode and a stationary electrode causes displacement of the movable electrode, comprising:
-
a step of forming the stationary electrode on a base; a step of depositing a sacrificial layer on the stationary electrode; a step of forming an elastic supporting member for supporting the movable electrode and the movable electrode on the sacrificial layer; and a step of forming a bimetal structure by depositing, on at least one of the movable electrode and the elastic supporting member, a material which is different from a material of the movable electrode and a material of the elastic supporting member.
-
Specification