NANO-CRYSTALLINE COMPOSITE-OXIDE THIN FILM, ENVIRONMENTAL GAS SENSOR USING THE THIN FILM, AND METHOD OF MANUFACTURING THE ENVIRONMENTAL GAS SENSOR
First Claim
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1. A nano-crystalline composite-oxide thin film for an environmental gas sensor, which is formed of hetero-oxide nano-crystalline particles having independent crystalline phases from each other.
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Abstract
A nano-crystalline composite-oxide thin film for an environmental gas sensor, an environmental gas sensor using the thin film, and a method of manufacturing the environmental gas sensor are provided. The nano-crystalline composite-oxide thin film is formed of hetero-oxide nano-crystalline particles having independent crystalline phases from each other, and the environmental gas sensor including the thin film has excellent characteristics including high sensitivity, high selectivity, high stability and low power consumption.
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Citations
13 Claims
- 1. A nano-crystalline composite-oxide thin film for an environmental gas sensor, which is formed of hetero-oxide nano-crystalline particles having independent crystalline phases from each other.
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4. An environmental gas sensor, comprising:
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a substrate; a metal electrode formed on the substrate; and a composite-oxide thin film formed of hetero-oxide nano-crystalline particles on the metal electrode. - View Dependent Claims (5, 6, 7, 8, 9)
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10. A method of manufacturing an environmental gas sensor, comprising:
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forming a metal electrode on a substrate; and growing hetero-oxide nano-crystalline particles on the metal electrode and forming a nano-crystalline composite-oxide thin film. - View Dependent Claims (11, 12, 13)
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