METHODS OF MAKING AND USING INTEGRATED AND TESTABLE SENSOR ARRAY

• US 20090148967A1
• Filed: 12/06/2007
• Published: 06/11/2009
• Est. Priority Date: 12/06/2007
• Status: Active Grant

• Current Assignee: General Electric Company
• Original Assignee: General Electric Company
• Inventors: Mills, David Martin, Wodnicki, Robert Gideon, Woychik, Charles Gerard, Durocher, Kevin Matthew, Tian, Wei-Cheng, Smith, Lowell Scott, Kennerly, Stacey Joy
• Granted Patent: US 7,781,238 B2
• Time in Patent Office: Days
• US Class Current: 438/17
• CPC Class Codes: H01L 22/14 for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps

Abstract

A method for making a testable sensor assembly is provided. The method includes forming a first sensor array on a first substrate having a first side and a second side, wherein the first sensor array is formed on the first side of the first substrate, coupling a first semiconductor wafer having a first side and a second side to the first sensor array, wherein the first side of the first semiconductor wafer is coupled to the first sensor array, thinning one of the second side of the first substrate or the second side of the first semiconductor wafer, and testing the first sensor array to identify operational and non-operational units in the testable sensor assembly before integration of the sensor assembly with interface electronics.

Claims

1. A method for making a testable sensor assembly, comprising:

forming a first sensor array on a first substrate having a first side and a second side, wherein the first sensor array is formed on the first side of the first substrate;

coupling a first semiconductor wafer having a first side and a second side to the first sensor array, wherein the first side of the first semiconductor wafer is coupled to the first sensor array;

thinning one of the second side of the first substrate or the second side of the first semiconductor wafer; and

testing the first sensor array to identify operational and non-operational units in the testable sensor assembly before integration of the sensor assembly with interface electronics.

2. The method of claim 1, wherein the first semiconductor wafer comprises a semiconductor-on-insulator wafer.

3. The method of claim 1, wherein the first sensor array comprises photodiodes, chemical sensors, optical sensors, capacitive micromachined ultrasound transducers (cMUTs), microelectrical mechanical systems (MEMS) devices, photodetectors, photo-transceivers, X-ray sensors, or combinations thereof.

4. The method of claim 1, wherein forming the first sensor array comprises:

forming a semiconductor layer on the first side of the first substrate;

doping the semiconductor layer; and

oppositely doping portions of the semiconductor layer to form p-n junction photodiodes.

5. The method of claim 1, wherein forming the first sensor array comprises:

depositing a layer of semiconductor on the first side of the first substrate; and

forming a plurality of cavities in the layer of semiconductor.

6. The method of claim 5, further comprising doping the layer of semiconductor.

7. The method of claim 1, further comprising:

coupling a second semiconductor wafer having a first side and a second side to the sensor assembly, wherein the second semiconductor wafer comprises a plurality of cavities disposed on the first side, and wherein the first side having the plurality of cavities is coupled to the thinned wafer; and

thinning the second side of one of the second semiconductor wafer or the other of the first substrate to expose the free internal membranes.

8. The method of claim 7, further comprising testing the free internal membranes to determine locations of operational and non-operational MEMS devices in the sensor assembly.

9. The method of claim 1, further comprising coupling a plurality of integrated circuit dies with the testable sensor assembly.

10. The method of claim 9, wherein coupling comprises bonding CMOS dies to the locations of the operational MEMS devices.

11. The method of claim 9, wherein coupling the plurality of integrated circuit dies comprises bonding the plurality of integrated circuit dies using an epoxy.

12. The method of claim 9, comprising forming vias from the operational devices of the sensor array to the integrated circuit dies.

13. The method of claim 12, further comprising conformally coating the vias with a conductive material to complete electrical connections to the integrated circuit dies.

14. The method of claim 1, comprising metallizing an upper surface of the sensor array.

15. The method of claim 1, comprising forming a trench through a layer of the sensor array to alleviate stresses within.

16. The method of claim 1, comprising coupling a substrate to the back of the plurality of integrated circuit dies.

17. The method of claim 16, wherein the substrate is semi-rigid so that the integrated sensor can curve over a surface.

18. The method of claim 16, wherein the substrate is a flexible substrate.

19. The method of claim 1, further comprising:

coupling a plurality of integrated circuit dies to the operational devices in the sensor array; and

thinning at least a portion of the second side of the other of the first substrate or the first semiconductor wafer to expose the sensor array.

20. The method of claim 19, wherein coupling the plurality of integrated circuit dies comprises potting the thinned second side of the other of the first substrate or the first semiconductor wafer with epoxy.

21. The method of claim 20, further comprising heating the epoxy to mold the epoxy in a predetermined shape.

22. A method for making an integrated and testable MEMS array, comprising:

forming a first plurality of MEMS cavities on a first substrate having a first side and a second side, wherein the first plurality of cavities are formed on the first side of the first substrate;

coupling a second substrate having a first side and a second side to the first plurality of MEMS cavities such that the first side of the second substrate is coupled to the first plurality of MEMS cavities;

thinning a second side of one of the first or second substrates such that at least a portion of a semiconductor layer of one of the first or second substrates is exposed;

coupling a third substrate having a first side and a second side to the exposed semiconductor layer, wherein the third substrate comprises a second plurality of cavities disposed on the first side, and wherein the second plurality of cavities are coupled to the exposed semiconductor layer, such that the exposed semiconductor layer is configured to act as free internal membranes for the MEMS array;

thinning the second side of one of the first, second or third substrates to expose an insulation layer;

testing the MEMS array to determine good and bad free internal membranes;

coupling a plurality of integrated circuit dies to the exposed insulation layer, wherein each of the plurality of integrated dies is coupled to portions of the good free internal membranes; and

removing the second side of the remaining first, second, or third substrates.

23. A method for making an integrated and testable sensor array, comprising:

forming a first plurality of sensor cavities on a first side of a first substrate, wherein the first substrate comprises the first side and a second side;

coupling a second substrate to the first plurality of sensor cavities;

thinning a second side of one of the first or second substrates such that at least a portion of a semiconductor layer of one of the first or second substrates is exposed to form a first exposed semiconductor layer;

coupling a semiconductor wafer having a first side and a second side to the first exposed semiconductor layer, wherein the semiconductor wafer comprises a second plurality of sensor cavities disposed on the first side of the semiconductor wafer, and wherein the second plurality of sensor cavities is coupled to the first exposed semiconductor layer, and wherein the first exposed semiconductor layer forms an internal membrane for the second plurality of MEMS cavities;

thinning the second side of the other of the first or the second substrates to expose an insulation layer to form the integrated and testable sensor array; and

testing the internal membranes of the integrated and testable sensor array to determine operational and non-operational MEMS units of the array before coupling the sensor array with interface electronics.