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Micromirror manufacturing method

  • US 20090149004A1
  • Filed: 12/24/2007
  • Published: 06/11/2009
  • Est. Priority Date: 12/26/2006
  • Status: Active Grant
First Claim
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1. A micro-electrical-mechanical-systems(MEMS) manufacturing method for dividing a plurality of MEMS devices each having at least one movable element, formed on a semiconductor wafer into individual MEMS devices, comprising:

  • Depositing an inorganic protection layer on the movable element before separating the MEMS devices from the wafer; and

    removing the inorganic protection layer after separating the MEMS devices from the wafer.

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