MICROFABRICATED ELASTOMERIC VALVE AND PUMP SYSTEMS
First Claim
1. A fluidic logic device comprising:
- an elastomeric block having a Young'"'"'s modulus between about 10 Pa and about 100 GPa; and
a plurality of microfabricated channels formed in the elastomeric block, each channel containing a pressure or flow representing a signal, a change in the pressure or flow in a first channel resulting in a change in the pressure or fluid flow in a second channel consistent with a logic operation.
1 Assignment
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Accused Products
Abstract
A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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Citations
67 Claims
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1. A fluidic logic device comprising:
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an elastomeric block having a Young'"'"'s modulus between about 10 Pa and about 100 GPa; and a plurality of microfabricated channels formed in the elastomeric block, each channel containing a pressure or flow representing a signal, a change in the pressure or flow in a first channel resulting in a change in the pressure or fluid flow in a second channel consistent with a logic operation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 44, 45, 46)
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9. A pressure amplifier comprising:
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an elastomeric block having a Young'"'"'s modulus between about 10 Pa and about 100 GPa formed with first and second microfabricated recesses therein; and an amplifier structure having a first surface area in contact with the first recess and a second surface area in contact with the second recess, the first surface area larger than the second surface area such that a pressure in the first recess is communicated by the amplifier structure as an amplified pressure to the second recess. - View Dependent Claims (10, 11, 12, 13, 47, 48, 49)
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14. A method of amplifying a pressure in a flow channel of a microfabricated elastomer structure, the method comprising:
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providing an elastomer block having a Young'"'"'s modulus between about 10 Pa and about 100 GPa including a first recess in contact with a first area of an amplifier structure and second recesses in contact with a second area of the amplifier structure; applying a pressure to the first area; and communicating the pressure to the second area, the second area smaller than the first area such that the pressure communicated to the second recess is amplified. - View Dependent Claims (15, 16, 19, 20, 50, 51, 52)
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- 17. A one-way valve comprising a microfabricated channel formed in an elastomeric block having a Young'"'"'s modulus between about 10 Pa and about 100 GPa, a flap integral with the elastomeric block projecting into the channel and blocking the channel, the flap deflectable to permit fluid to flow in only a first direction.
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21. A method of filling a microfabricated elastomeric structure with fluid comprising:
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providing an elastomer block having a flow channel, the elastomer block comprising an elastomer material having a Young'"'"'s modulus between about 10 Pa and about 100 GPa and known to be permeable to a gas; filling the flow channel with the gas; injecting a fluid under pressure into the flow channel; and permitting gas remaining in the flow channel to diffuse out of the elastomer material. - View Dependent Claims (22, 56, 57, 58)
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23. A method of metering a volume of fluid comprising:
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providing a chamber having a volume in an elastomeric block having a Young'"'"'s modulus between about 10 Pa and about 100 GPa separated from a control recess by an elastomeric membrane; supplying a pressure to the control recess such that the membrane is deflected into the chamber and the volume is reduced by a calibrated amount, thereby excluding from the chamber the calibrated volume of fluid. - View Dependent Claims (24, 25, 26, 27, 28, 59, 60, 61)
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29. A protein crystallization system comprising:
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an elastomeric block having a Young'"'"'s modulus between about 10 Pa and about 100 GPa and including a microfabricated chamber having a volume and receiving a protein solution; and a microfabricated flow channel in fluid communication with the chamber, the flow channel receiving a countersolvent and introducing a fixed volume of countersolvent to the chamber. - View Dependent Claims (30, 31, 62, 63, 64)
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32. A method of promoting adhesion between layers of a microfabricated structure, the method comprising:
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exposing a surface of a first component layer to a chemical; exposing a surface of a second component layer to the chemical; and placing the surface of the first component layer into contact with the surface of the second component layer. - View Dependent Claims (33, 34, 35)
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36. A method for actuating a microfabricated elastomer structure comprising:
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providing an aqueous salt solution in a control recess formed in an elastomeric block and overlying and separated from a flow channel by an elastomer membrane; and applying a potential difference to the salt solution to generate a gas, such that a pressure in the control recess causes the membrane to deflect into the flow channel. - View Dependent Claims (37, 38)
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39. A microfabricated syringe structure comprising:
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a first chamber formed in an elastomeric block having a Young'"'"'s modulus between about 10 Pa and about 100 GPa and including an aqueous salt solution, a first electrode, and a second electrode; a second chamber formed in the elastomeric block and containing an inert liquid, the second chamber in fluid communication with the first chamber through a first flow channel; a third chamber formed in the elastomeric block and containing an ejectable material, the third chamber in fluid communication with the second chamber through a second flow channel and in fluid communication with an environment through an outlet, such that application of a potential difference across the electrodes generates gas in the first chamber, the gas displacing the inert material into the third chamber, the inert material displacing the injectable material into the environment. - View Dependent Claims (65, 66, 67)
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40-43. -43. (canceled)
Specification