FAULT DETECTION APPARATUSES AND METHODS FOR FAULT DETECTION OF SEMICONDUCTOR PROCESSING TOOLS
First Claim
1. A method for detecting a fault of a semiconductor production tool, the method comprising the steps of:
- sensing a signal associated with a test component of the semiconductor production tool during operation of the semiconductor production tool;
converting the signal to an electronic test signal;
providing a prerecorded signature signal corresponding to the test component; and
comparing the test signal and the prerecorded signature signal.
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Abstract
Fault detection apparatuses and methods for detecting a processing or hardware performance fault of a semiconductor production tool have been provided. In an exemplary embodiment, a method for detecting a fault of a semiconductor production tool comprises sensing a signal associated with a test component of the production tool during operation of the production tool and converting the signal to an electronic test signal. A prerecorded signature signal corresponding to the test component is provided and the test signal and the prerecorded signature signal are compared.
41 Citations
34 Claims
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1. A method for detecting a fault of a semiconductor production tool, the method comprising the steps of:
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sensing a signal associated with a test component of the semiconductor production tool during operation of the semiconductor production tool; converting the signal to an electronic test signal; providing a prerecorded signature signal corresponding to the test component; and comparing the test signal and the prerecorded signature signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A method for detecting a fault of a semiconductor production tool, the method comprising the steps of:
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recording and storing a signature signal corresponding to a test component of the semiconductor production tool; mounting at least one detection device so that it is capable of sensing a signal from the test component; operating the semiconductor production tool; sensing a signal produced by the test component during operation of the semiconductor production tool and converting that signal to a data spectrum; comparing the signature signal to the data spectrum; and producing a fault detection signal based on results of the comparison of the signature signal and the data spectrum. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26)
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27. A fault detection apparatus for a semiconductor production tool, wherein the fault detection apparatus comprises:
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a detection device configured to sense a signal from a test component of the semiconductor production tool and produce a test signal corresponding to the signal; a signature signal database that stores a signature signal corresponding to operation of the test component in a known state; and a comparator in electrical communication with the detection device and the signature signal database, wherein the comparator is configured to compare a test signal received from the detection device and a signature signal received from the signature signal database. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34)
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Specification