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MULTIPLE CHUCK SCANNING STAGE

  • US 20090153824A1
  • Filed: 12/17/2007
  • Published: 06/18/2009
  • Est. Priority Date: 12/17/2007
  • Status: Abandoned Application
First Claim
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1. A substrate processing system, comprising:

  • a stage;

    first and second chucks mounted on the stage, wherein the first and second chucks are adapted to hold first and second substrates; and

    at least one substrate processing head positioned proximate the stage adapted to process the first and second substrates,wherein the stage and processing head are configured for relative movement for a sufficient distance for the processing head to process both the first and second test substrates.

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