METHOD OF MANUFACTURING MAGNETIC FIELD DETECTOR
First Claim
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1. A method of manufacturing a magnetic field detector using a thin film for detecting magnetic beads, the method comprising:
- preparing a substrate;
depositing the thin film on an upper surface of the substrate; and
etching the thin film to form a ring-shaped magnetoresistive element.
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Abstract
Disclosed is a method of manufacturing a magnetic field detector having various structures that can be used as a high-density magnetic biosensor. An embodiment of the invention provides a method of manufacturing a magnetic field detector including a magnetoresistive element using a magnetic bead detecting thin film. The method includes: preparing a substrate; depositing the thin film on an upper surface of the substrate; and etching the thin film to form a ring-shaped magnetoresistive element.
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17 Claims
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1. A method of manufacturing a magnetic field detector using a thin film for detecting magnetic beads, the method comprising:
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preparing a substrate; depositing the thin film on an upper surface of the substrate; and etching the thin film to form a ring-shaped magnetoresistive element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification