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GRINDING WHEEL TRUING TOOL AND MANUFACTURING METHOD THEREOF, AND TRUING APPARATUS, METHOD FOR MANUFACTURING GRINDING WHEEL AND WAFER EDGE GRINDING APPARATUS USING THE SAME

  • US 20090156104A1
  • Filed: 12/10/2008
  • Published: 06/18/2009
  • Est. Priority Date: 12/14/2007
  • Status: Active Grant
First Claim
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1. A grinding wheel truing tool, which compensates a groove of a fine-grinding wheel for fine-grinding a wafer edge, comprising:

  • a truer having an edge of the same angle as a slanted surface of the groove of the fine-grinding wheel and of a cross-sectional shape corresponding to a cross-sectional shape of the groove.

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