IMPLEMENTATION OF ADVANCED ENDPOINT FUNCTIONS WITHIN THIRD PARTY SOFTWARE BY USING A PLUG-IN APPROACH
First Claim
1. A method of providing a control function for a semiconductor process to a pre-existing software architecture, the method comprising:
- providing a plug-in to the pre-existing software architecture;
providing an upgrade library file having the control function therein; and
uploading the upgrade library file to the pre-existing software architecture at the plug-in to facilitate process control of the semiconductor process.
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Accused Products
Abstract
Embodiments described herein generally relate to a method of updating a software routine with subprograms and subroutines that can be accessed by an end user on an as-needed basis. In one embodiment, a method of providing a control function for a semiconductor process to a pre-existing software architecture is described. The method includes providing a plug-in to the pre-existing software architecture, providing an upgrade library file having the control function therein, and uploading the upgrade library file to the pre-existing software architecture at the plug-in to facilitate process control of the semiconductor process.
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Citations
20 Claims
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1. A method of providing a control function for a semiconductor process to a pre-existing software architecture, the method comprising:
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providing a plug-in to the pre-existing software architecture; providing an upgrade library file having the control function therein; and uploading the upgrade library file to the pre-existing software architecture at the plug-in to facilitate process control of the semiconductor process. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of providing an upgraded control function for a semiconductor process to a pre-existing software architecture in communication with a plasma chamber, the method comprising:
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providing a plug-in to the pre-existing software architecture having a first library file therein; providing a second library file having the upgraded control function therein; and replacing the first library file with the upgrade library at the plug-in to facilitate process control in the plasma chamber. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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- 18. A computer-readable medium comprising a first set of equations for control of a semiconductor process and configured to replace a second set of equations executed by a semiconductor processing tool processor, wherein the first set of equations are bundled into a dynamic linked library (DLL).
Specification