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Temperature Stable MEMS Resonator

  • US 20090158566A1
  • Filed: 12/21/2007
  • Published: 06/25/2009
  • Est. Priority Date: 12/21/2007
  • Status: Active Grant
First Claim
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1. A method for fabricating a microelectromechanical system (MEMS) resonator having a reduced magnitude of thermal coefficient of frequency (TCF), the method comprising:

  • defining one or more slots within the MEMS resonator;

    fabricating the one or more slots; and

    filling the one or more slots with a compensating material,wherein a temperature coefficient of Young'"'"'s Modulus (TCE) of the compensating material has a sign opposite to a TCE of a material comprising the MEMS resonator.

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