×

Angular Velocity Sensor

  • US 20090158847A1
  • Filed: 12/19/2008
  • Published: 06/25/2009
  • Est. Priority Date: 12/21/2007
  • Status: Active Grant
First Claim
Patent Images

1. An angular velocity sensor comprising:

  • a substrate;

    a mass portion;

    an excitation member that excites the mass portion along an excitation direction;

    a beam supporting the mass portion so that the mass portion capable of being displaced at least along the excitation direction and a first detecting direction that is orthogonal to the excitation direction, the beam comprises a first portion and a second portion, and one end of the beam is connected with the mass portion and other end of the beam is connected with the substrate; and

    a first detecting member disposed on the beam, the first detecting member detects the vibration of the beam along the first detecting direction, whereinthe spring constant of the first portion along the excitation direction is lower than the spring constant of the first portion along the first detecting direction, and the spring constant of the second portion along the first detecting direction is lower than the spring constant of the second portion along the excitation direction,the first portion is arranged closer to the mass portion than the second portion, andthe first detecting member is disposed on a farther beam portion of the beam, wherein the farther beam portion is arranged farther away from the mass portion than the first portion.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×