Angular Velocity Sensor
First Claim
1. An angular velocity sensor comprising:
- a substrate;
a mass portion;
an excitation member that excites the mass portion along an excitation direction;
a beam supporting the mass portion so that the mass portion capable of being displaced at least along the excitation direction and a first detecting direction that is orthogonal to the excitation direction, the beam comprises a first portion and a second portion, and one end of the beam is connected with the mass portion and other end of the beam is connected with the substrate; and
a first detecting member disposed on the beam, the first detecting member detects the vibration of the beam along the first detecting direction, whereinthe spring constant of the first portion along the excitation direction is lower than the spring constant of the first portion along the first detecting direction, and the spring constant of the second portion along the first detecting direction is lower than the spring constant of the second portion along the excitation direction,the first portion is arranged closer to the mass portion than the second portion, andthe first detecting member is disposed on a farther beam portion of the beam, wherein the farther beam portion is arranged farther away from the mass portion than the first portion.
1 Assignment
0 Petitions
Accused Products
Abstract
Beams 70a, 70b, 70c and, 70d. of an angular velocity sensor 100 is provided with a folded type beam 73 that has a spring constant which is smaller along the excitation direction (x-axis direction) than along a detecting direction (y-axis direction), and a straight type beam 75 that has a spring constant which is smaller along the detecting direction (y-axis direction) than along the excitation direction (x-axis direction). The folded type beam 73 is arranged closer to the mass portion 40 than the straight type beam 75. The detecting member 60 is disposed on a farther beam portion of the beam 70b, wherein the farther beam portion is arranged farther away from the mass portion 40 than the folded type beam 73.
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Citations
9 Claims
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1. An angular velocity sensor comprising:
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a substrate; a mass portion; an excitation member that excites the mass portion along an excitation direction; a beam supporting the mass portion so that the mass portion capable of being displaced at least along the excitation direction and a first detecting direction that is orthogonal to the excitation direction, the beam comprises a first portion and a second portion, and one end of the beam is connected with the mass portion and other end of the beam is connected with the substrate; and a first detecting member disposed on the beam, the first detecting member detects the vibration of the beam along the first detecting direction, wherein the spring constant of the first portion along the excitation direction is lower than the spring constant of the first portion along the first detecting direction, and the spring constant of the second portion along the first detecting direction is lower than the spring constant of the second portion along the excitation direction, the first portion is arranged closer to the mass portion than the second portion, and the first detecting member is disposed on a farther beam portion of the beam, wherein the farther beam portion is arranged farther away from the mass portion than the first portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification